Micro optical scanner capable of measuring operating frequency of micro mirror

• US 20070153351A1
• Filed: 06/12/2006
• Published: 07/05/2007
• Est. Priority Date: 12/30/2005
• Status: Abandoned Application

• Current Assignee: Samsung Electronics Co. Ltd.
• Original Assignee: Samsung Electronics Co. Ltd.
• Inventors: Choa, Sung-hoon, Won, Jong-hwa
• Application Number:
  US11/450,272
• Publication Number:
  US 20070153351A1
• Time in Patent Office: Days
• US Class Current: 359/224.100
• CPC Class Codes: G02B 26/127 Adaptive control of the scanning light beam, e.g. using the feedback from one or more detectors G02B27/0031 takes precedence

Abstract

A micro optical scanner, which is capable of measuring the operating frequency of a micro mirror, includes: a substrate; the micro mirror which is integrally formed with the substrate and rotates to scan incident light; a package block sealing the substrate and the micro mirror and including a transparent window in an upper portion thereof; and at least one photo detector which detects reflected light from the transparent window from the light scanned by the micro mirror.

Claims

1. A micro optical scanner comprising:

a substrate;

a micro mirror which is integrally formed with the substrate and rotates to scan incident light;

a package block sealing the substrate and the micro mirror and comprising a transparent window in an upper portion thereof; and

at least one photo detector which detects light reflected by the transparent window among the light scanned by the micro mirror.

2. The micro optical scanner of claim 1, wherein the at least one photo detector is integrally formed with the substrate.

3. The micro optical scanner of claim 2, wherein the at least one photo detector is formed on the substrate using a complementary metal-oxide semiconductor (CMOS) manufacturing process.

4. The micro optical scanner of claim 1, wherein the micro mirror has first and second scanning directions perpendicular to each other, and the at least one photo detector comprises a first photo detector measuring a first operating frequency along the first scanning direction and a second photo detector measuring a second operating frequency along the second scanning direction.

5. The micro optical scanner of claim 4, wherein the first photo detector and the second photo detector are respectively disposed on two adjacent sides of the substrate, which are perpendicular to each other.

6. The micro optical scanner of claim 1, wherein the operating frequency of the micro mirror is measured from a light detecting cycle of the photo detector.

7. The micro optical scanner of claim 1, wherein at least the transparent window is inclined in the upper package block.

8. The micro optical scanner of claim 7, wherein a light absorbing layer is formed on an inner surface of the upper package block at a region other than the transparent window, thereby to prevent the scanned light from being reflected.

9. The micro optical scanner of claim 1, wherein the substrate comprises a plurality of vertical static comb-electrodes, the micro mirror comprises a plurality of vertical moving comb-electrodes, and the plurality of static comb-electrodes are arranged to alternate with respect to the plurality of moving comb-electrodes.

10. The micro optical scanner of claim 1, wherein the substrate is a silicon-on-insulator (SOI) substrate.