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Micro optical scanner capable of measuring operating frequency of micro mirror

  • US 20070153351A1
  • Filed: 06/12/2006
  • Published: 07/05/2007
  • Est. Priority Date: 12/30/2005
  • Status: Abandoned Application
First Claim
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1. A micro optical scanner comprising:

  • a substrate;

    a micro mirror which is integrally formed with the substrate and rotates to scan incident light;

    a package block sealing the substrate and the micro mirror and comprising a transparent window in an upper portion thereof; and

    at least one photo detector which detects light reflected by the transparent window among the light scanned by the micro mirror.

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