Sub-wavelength grating integrated VCSEL
First Claim
1. A sub-wavelength grating reflector, comprising:
- a first layer of low refractive index material;
a plurality of periodically spaced apart segments of high refractive index material on said layer of low refractive index material; and
a second layer of low refractive index material on said segments of high refractive index material.
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Accused Products
Abstract
A vertical cavity surface emitting laser (VCSEL) is described using a sub-wavelength grating (SWG) structure that has a very broad reflection spectrum and very high reflectivity. The grating comprises segments of high and low refractive index materials with an index differential between the high and low index materials. By way of example, a SWG reflective structure is disposed over a low index cavity region and above another reflective layer (either SWG or DBR). In one embodiment, the SWG structure is movable, such as according to MEMS techniques, in relation to the opposing reflector to provide wavelength selective tuning. The SWG-VCSEL design is scalable to form the optical cavities for a range of SWG-VCSELs at different wavelengths, and wavelength ranges.
125 Citations
34 Claims
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1. A sub-wavelength grating reflector, comprising:
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a first layer of low refractive index material;
a plurality of periodically spaced apart segments of high refractive index material on said layer of low refractive index material; and
a second layer of low refractive index material on said segments of high refractive index material. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. An optical resonator cavity, comprising:
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a first sub-wavelength grating reflector configured with a plurality of periodically spaced segments of high refractive index material over a low refractive index material, the combination forming a first reflector; and
a distributed Bragg reflector retained substantially parallel to said first reflector;
wherein said distributed Bragg reflector is sufficiently separated from said first sub-wavelength grating reflector to form a cavity resonator region between said sub-wavelength grating reflector and said distributed Bragg reflector. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20)
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21. A surface emitting optical device cavity, comprising:
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a first sub-wavelength grating (SWG) reflector configured with a plurality of periodically spaced segments of high refractive index material over a layer of low refractive index material; and
a distributed Bragg reflector (DBR) substantially parallel to said first reflector;
wherein said distributed Bragg reflector is separated from said first sub-wavelength grating reflector by a predetermined distance to form a resonant cavity. - View Dependent Claims (22, 23, 24, 25)
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26. A vertical-cavity surface emitting laser device, comprising:
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a first sub-wavelength grating (SWG) reflector configured with a plurality of periodically spaced segments of high refractive index material over a layer of low refractive index material forming a first reflector;
a first distributed Bragg reflector (DBR) configured with a plurality of alternating layers of high and low refractive index materials;
said first distributed Bragg reflector retained substantially parallel to said first reflector to form a second reflector;
a resonant cavity of predetermined depth formed between said first reflector and said second reflector;
means for optical confinement between said first and second reflectors; and
means for current injection. - View Dependent Claims (27, 28, 29, 30, 31, 32, 33, 34)
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Specification