GATE STRUCTURE OF SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
First Claim
1. A gate structure of a semiconductor device, comprising:
- a gate insulating layer formed over a channel region of a silicon substrate;
protective oxide regions formed at both edges of the gate insulating layer; and
a gate formed over the gate insulating layer and the protective oxide regions.
1 Assignment
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Accused Products
Abstract
A semiconductor gate structure may be manufactured by forming an oxide layer over a silicon substrate before forming a gate insulating layer. The oxide is etched to form an opening that exposes a channel region. After forming a gate insulating layer in the opening, a gate conductor layer is deposited and is etched to form a gate. The oxide layer is etched to leave protective oxide regions at both edges of the gate insulating layer. The oxide regions protect the gate insulating layer from plasma damage during a gate etching process. Also, since the length of the gate insulating layer is smaller than the gate due to the protective oxides, ion diffusion is prevented from causing overlap in low density source and drain regions under the gate insulating layer.
7 Citations
14 Claims
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1. A gate structure of a semiconductor device, comprising:
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a gate insulating layer formed over a channel region of a silicon substrate;
protective oxide regions formed at both edges of the gate insulating layer; and
a gate formed over the gate insulating layer and the protective oxide regions. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A method of manufacturing a gate structure of a semiconductor substrate, the method comprising:
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forming an oxide layer over a silicon substrate;
etching the oxide layer to form an opening which exposes a channel region of the silicon substrate;
forming a gate insulating layer in the opening over the exposed silicon substrate;
depositing a gate conductor layer to a thickness at least enough to fill the opening; and
etching the gate conductor layer to form a gate and etching the oxide layer to form protective oxide regions at both edges of the gate insulating layer. - View Dependent Claims (8, 9, 10, 11, 12, 13, 14)
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Specification