METHOD OF MANUFACTURING A COPPER INDUCTOR
First Claim
Patent Images
1. A method comprising forming a plurality of elements of an inductor by a damascene process.
1 Assignment
0 Petitions
Accused Products
Abstract
An inductor can be integrated with other components in a device formed on one semiconductor chip. The integrated circuit inductor has reduced electric resistance in the conductor and minimized influence on other circuit elements. A method of manufacturing the inductor which minimizes the area occupied by the inductor in a semiconductor chip allows the chip to be located in a small, narrow region along the edge of a chip, with coils which are vertically aligned with respect to the semiconductor substrate.
14 Citations
13 Claims
- 1. A method comprising forming a plurality of elements of an inductor by a damascene process.
- 12. An apparatus comprising a plurality of elements of an inductor having a damascene structure.
Specification