Apparatus and method for the analysis of a process having parameter-based faults
First Claim
1. An apparatus for the analysis of a process having parameter-based faults, comprising:
- a parameter value inputter configured for inputting values of at least one process parameter;
a fault detector, configured for detecting the occurrence of a fault;
a learning file creator associated with said parameter value inputter and said fault detector, configured for separating said input values into a first learning file and a second learning file, said first learning file comprising input values from a collection period preceding each of said detected faults, and said second learning file comprising input values input outside said collection periods; and
a learning file analyzer associated with said learning file creator, configured for performing a separate statistical analysis of said first and second learning files, thereby to assess a process status.
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Abstract
An apparatus for the analysis of a process having parameter-based faults includes: a parameter value inputter configured for inputting values of at least one process parameter, a fault detector, configured for detecting the occurrence of a fault, a learning file creator associated with the parameter value inputter and the fault detector, configured for separating the input values into a first learning file and a second learning file, the first learning file comprising input values from a collection period preceding each of the detected faults, and the second learning file comprising input values input outside the collection periods, and a learning file analyzer associated with the learning file creator, configured for performing a separate statistical analysis of the first and second learning files, thereby to asses a process status.
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Citations
50 Claims
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1. An apparatus for the analysis of a process having parameter-based faults, comprising:
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a parameter value inputter configured for inputting values of at least one process parameter;
a fault detector, configured for detecting the occurrence of a fault;
a learning file creator associated with said parameter value inputter and said fault detector, configured for separating said input values into a first learning file and a second learning file, said first learning file comprising input values from a collection period preceding each of said detected faults, and said second learning file comprising input values input outside said collection periods; and
a learning file analyzer associated with said learning file creator, configured for performing a separate statistical analysis of said first and second learning files, thereby to assess a process status. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28)
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29. A method for the analysis of a process having parameter-based faults, comprising:
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inputting the values of at least one process parameter over time;
detecting occurrences of process faults;
separating said input values into a first learning file and a second learning file, said first learning file comprising input values from a collection period preceding each of said detected faults, and said second learning file comprising input values input outside said collection periods; and
performing a separate statistical analysis of said first and second learning files, thereby to asses a process status for a specified set of parameter values. - View Dependent Claims (30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50)
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Specification