Method and apparatus for detecting defects in integrated circuit die from stimulation of statistical outlier signatures
First Claim
1. A method comprising steps of:
- (a) receiving as input a test value of an electrical parameter measured for each of a plurality of identically designed electrical circuits;
(b) identifying one of the identically designed electrical circuits as an outlier for which the test value of the electrical parameter varies from a mean test value of the electrical parameter for the plurality of identically designed electrical circuits by at least a selected difference;
(c) monitoring the test value while subjecting a location on the outlier to a stimulus to detect a change in the test value as a function of the location; and
(d) generating as output the location for which the change in the test value is detected to identify a defect in the outlier.
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Accused Products
Abstract
A method and computer program for detecting and locating defects in integrated circuit die from stimulation of statistical outlier signatures includes receiving as input a test value of an electrical parameter measured for each of a plurality of identically designed electrical circuits, identifying one of the identically designed electrical circuits as an outlier for which the test value of the electrical parameter varies from a mean test value of the electrical parameter for the plurality of identically designed electrical circuits by at least a selected difference, monitoring the test value while subjecting a location on the outlier to a stimulus to detect a change in the test value as a function of the location, and generating as output the location for which the change in the test value is detected to identify a defect in the outlier.
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Citations
21 Claims
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1. A method comprising steps of:
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(a) receiving as input a test value of an electrical parameter measured for each of a plurality of identically designed electrical circuits;
(b) identifying one of the identically designed electrical circuits as an outlier for which the test value of the electrical parameter varies from a mean test value of the electrical parameter for the plurality of identically designed electrical circuits by at least a selected difference;
(c) monitoring the test value while subjecting a location on the outlier to a stimulus to detect a change in the test value as a function of the location; and
(d) generating as output the location for which the change in the test value is detected to identify a defect in the outlier. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A computer program product comprising:
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a medium for embodying a computer program for input to a computer; and
a computer program embodied in the medium for causing the computer to perform steps of;
(a) receiving as input a test value of an electrical parameter measured for each of a plurality of identically designed electrical circuits;
(b) identifying one of the identically designed electrical circuits as an outlier for which the test value of the electrical parameter varies from a mean test value of the electrical parameter for the plurality of identically designed electrical circuits by at least a selected difference;
(c) monitoring the test value while subjecting a location on the outlier to a stimulus to detect a change in the test value as a function of the location; and
(d) generating as output the location for which the change in the test value is detected to identify a defect in the outlier. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. An apparatus comprising:
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a measuring apparatus for measuring a test value of an electrical parameter for each of a plurality of identically designed electrical circuits to identify an outlier;
an apparatus for subjecting the outlier to a stimulus; and
a monitoring device for monitoring the test value while subjecting a location on the outlier to a stimulus to detect a change in the test value as a function of the location.
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Specification