Yield-limiting design-rules-compliant pattern library generation and layout inspection
First Claim
1. A computer-implemented method for analyzing process window compliance of a design, comprising:
- identifying layout pattern configurations that have process windows that fail to meet respective local performance specifications;
searching for any layout pattern configurations in the design that substantially match any of the identified layout pattern configurations; and
modifying any matching layout pattern configurations found in the design to make the layout pattern configurations compliant with their respective process windows.
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Accused Products
Abstract
A method and system is provided for analyzing process window compliance of an integrated circuit design. Aspects of the present invention include identifying layout pattern configurations that have process windows that fail to meet respective local performance specifications; searching for any layout pattern configurations in a design that substantially match any of the identified layout pattern configurations; and modifying any matching layout pattern configurations found in the design to make the layout pattern configurations compliant with their respective process windows.
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Citations
15 Claims
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1. A computer-implemented method for analyzing process window compliance of a design, comprising:
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identifying layout pattern configurations that have process windows that fail to meet respective local performance specifications;
searching for any layout pattern configurations in the design that substantially match any of the identified layout pattern configurations; and
modifying any matching layout pattern configurations found in the design to make the layout pattern configurations compliant with their respective process windows. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. An executable software product stored on a computer-readable medium containing program instructions for analyzing process window compliance of a design, the program instructions for:
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identifying layout pattern configurations that have process windows that fail to meet respective local performance specifications;
searching for any layout pattern configurations in the design that substantially match any of the identified layout pattern configurations; and
modifying any matching layout pattern configurations found in the design to make the layout pattern configurations compliant with their respective process windows. - View Dependent Claims (9, 10, 11, 12, 13, 14)
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15. A system for analyzing process window compliance of a design, comprising:
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a memory for storing layout pattern configurations, design data for a design, and local performance specifications; and
a processor coupled to the memory for executing a process compliance window application, the process compliance window application functional for, identifying the layout pattern configurations that have process windows that fail to meet respective local performance specifications;
searching for any layout pattern configurations in the design data that substantially match any of the identified layout pattern configurations; and
modifying any matching layout pattern configurations found in the design data to make the layout pattern configurations compliant with their respective process windows.
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Specification