Methods and systems for removing multiple die(s) from a surface
First Claim
1. A method comprising:
- aligning at least one opening of a vacuum head with a plurality of corresponding dies that are attached to a surface;
reducing adhesion between the corresponding dies and the surface; and
applying a vacuum through the vacuum head to remove the corresponding dies from the surface.
1 Assignment
0 Petitions
Accused Products
Abstract
Methods, systems, and apparatuses for removing dies attached to a support element are described. The support element has a first surface to which the dies are attached and a second surface that opposes the first surface. In a first example, a first vacuum is applied to the second surface outside an area defined on the second surface. At least one force element applies a force to the second surface inside the area, thereby moving a plurality of dies with respect to other dies. In a second example, heat is applied to an adhesive between the first surface and the plurality of dies to at least partially deactivate the adhesive. A second vacuum is applied to the plurality of dies to remove the plurality of dies from the first surface.
-
Citations
38 Claims
-
1. A method comprising:
-
aligning at least one opening of a vacuum head with a plurality of corresponding dies that are attached to a surface;
reducing adhesion between the corresponding dies and the surface; and
applying a vacuum through the vacuum head to remove the corresponding dies from the surface. - View Dependent Claims (2, 3, 4)
-
-
5. An apparatus comprising:
-
means for reducing adhesion between a plurality of dies and a surface; and
a vacuum assembly having at least one opening that is configured to apply a first vacuum concurrently to the plurality of dies to remove the plurality of dies from the surface. - View Dependent Claims (6, 7, 8)
-
-
9. A method comprising:
-
aligning at least one opening of a vacuum head with a plurality of corresponding dies that are attached to a first surface of a support element, wherein the support element further has a second surface that is opposite the first surface;
applying a first vacuum to the second surface of the support element outside an area;
applying a force to the second surface inside the area, thereby moving the corresponding dies toward the vacuum head; and
applying a second vacuum through the vacuum head to remove the corresponding dies from the support element. - View Dependent Claims (10, 11, 12, 13, 14, 15)
-
-
16. A method of removing a plurality of dies from an array of dies that are attached to a first surface of a support element, the support element having a second surface that opposes the first surface, comprising:
-
applying a first vacuum to the second surface outside an area corresponding to a perimeter of the plurality of dies;
applying a force to the second surface inside the area, thereby moving the plurality of dies with respect to other dies of the array of dies; and
applying a second vacuum to the plurality of dies to remove the plurality of dies from the first surface. - View Dependent Claims (17, 18, 19, 20, 21)
-
-
22. An apparatus comprising:
-
a first vacuum assembly having at least one opening that is capable of applying a first vacuum to corresponding dies to remove the corresponding dies from a first surface of a support element;
a second vacuum assembly configured to apply a second vacuum to a second surface of the support element outside an area;
at least one force element configured to apply a force to the second surface inside the area, wherein the at least one force element is capable of moving the corresponding dies toward the first vacuum assembly. - View Dependent Claims (23, 24, 25, 26, 27, 28, 29)
-
-
30. An apparatus for removing a plurality of dies from an array of dies that are attached to a first surface of a support element, the support element having a second surface that opposes the first surface, comprising:
-
means for applying a first vacuum to the second surface outside an area corresponding to a perimeter of the plurality of dies;
means for applying a force to the second surface inside the area, wherein the means for applying the force is configured to move the plurality of dies with respect to other dies of the array of dies; and
means for applying a second vacuum to the plurality of dies to remove the plurality of dies from the first surface. - View Dependent Claims (31, 32, 33, 34, 35, 36, 37, 38)
-
Specification