Display substrate, method of manufacturing the same and display panel having the same

• US 20070158652A1
• Filed: 12/27/2006
• Published: 07/12/2007
• Est. Priority Date: 12/28/2005
• Status: Active Grant

• Current Assignee: Samsung Display Company Limited (Samsung Electronics Co. Ltd.)
• Original Assignee: Samsung Electronics Co. Ltd.
• Inventors: Lee, Je-Hun, Lee, Jun-Young, Kang, Sung-Wook, Kim, Bo-Sung, Kim, Young-Min
• Granted Patent: US 8,035,102 B2
• Time in Patent Office: Days
• US Class Current: 257/59
• CPC Class Codes: G02F 1/13439 characterised by their electrical, optical, physical properties; materials therefor; method of making
• CPC Class Codes: H10K 10/464 Lateral top-gate IGFETs comprising only a single gate
• CPC Class Codes: H10K 10/466 Lateral bottom-gate IGFETs comprising only a single gate
• CPC Class Codes: H10K 10/82 Electrodes
• CPC Class Codes: H10K 19/10 comprising field-effect transistors

Abstract

An improved display substrate is provided to reduce surface defects on insulating layers of organic thin film transistors. Related methods of manufacture are also provided. In one example, a display substrate includes a base, a plurality of data lines, a plurality of gate lines, a pixel defined by the data lines and the gate lines, an organic thin film transistor, and a pixel electrode. The data lines are on the base and are oriented in a first direction. The gate lines are oriented in a second direction that crosses the first direction. The organic thin film transistor includes a source electrode electrically connected to one of the data lines, a gate electrode electrically connected to one of the gate lines, and an organic semiconductor layer. The pixel electrode is disposed in the pixel and electrically connected to the organic thin film transistor. The pixel electrode comprises a transparent oxynitride.

Claims

1. A display substrate comprising:

a base;

a plurality of data lines on the base, wherein the data lines are oriented in a first direction;

a plurality of gate lines oriented in a second direction that crosses the first direction;

a pixel defined by the data lines and the gate lines;

an organic thin film transistor including;

a source electrode electrically connected to one of the data lines,

a gate electrode electrically connected to one of the gate lines, and

an organic semiconductor layer; and

a pixel electrode disposed in the pixel and electrically connected to the organic thin film transistor, wherein the pixel electrode comprises a transparent oxynitride.

2. The display substrate of claim 1, wherein the transparent oxynitride includes at least one selected from a group consisting of indium (In), tin (Sn), zinc (Zn), aluminum (Al), and gallium (Ga).

3. The display substrate of claim 1, further comprising an insulating layer below the pixel electrode.

4. The display substrate of claim 3, wherein the pixel electrode comprises:

a lower conductor on the insulating layer and including the transparent oxynitride; and

an upper conductor on the lower conductor and including a transparent oxide.

5. The display substrate of claim 4, wherein the transparent oxide includes at least one selected from a group consisting of indium (In), tin (Sn), zinc (Zn), aluminum (Al), and gallium (Ga).

6. The display substrate of claim 1, wherein the source electrode is electrically connected to the one of the data lines through a contact hole, and wherein the source electrode and the pixel electrode are formed from a layer of the transparent oxynitride.

7. The display substrate of claim 6, wherein the drain electrode is integrally formed with the pixel electrode.

8. The display substrate of claim 1, further comprising a stopper layer on the organic semiconductor layer.

9. A method for manufacturing a display substrate comprising:

forming a data line on a base, wherein the data line is oriented in a first direction;

forming a gate line and a gate electrode electrically connected to the gate line, wherein the gate line is oriented in a second direction that crosses the first direction;

forming a first insulating layer on the gate line and the gate electrode;

forming a transparent conductor on the insulating layer, wherein the transparent conductor comprises an oxynitride; and

patterning the transparent conductor to form a source electrode electrically connected to the data line, a pixel electrode, and a drain electrode integrally formed with the pixel electrode.

10. The method of claim 9, further comprising forming a second insulating layer on the data line and the base.

11. The method of claim 9, wherein forming the first insulating layer comprises forming a contact hole to expose a portion of the data line.

12. The method of claim 9, further comprising forming an organic semiconductor layer on the source electrode and the drain electrode, and above the gate electrode.

13. The method of claim 9, further comprising forming a passivation layer on the organic semiconductor layer, the source electrode, and the drain electrode.

14. The method of claim 9, wherein the forming the transparent conductor comprises providing nitrogen gas to the first insulating layer at a flow rate in a range of about 20 standard cubic centimeters per minute (sccm) to about 40 sccm.

15. The method of claim 9, wherein the oxynitride includes at least one selected from a group consisting of indium (In), tin (Sn), zinc (Zn), aluminum (Al), and gallium (Ga).

16. The method of claim 15, wherein forming the transparent conductor comprises:

forming a lower conductor by depositing transparent oxynitride on the first insulating layer; and

forming an upper conductor by depositing transparent oxide on the lower conductor.

17. The method of claim 16, wherein the transparent oxide includes at least one selected from a group consisting of indium (In), tin (Sn), zinc (Zn), aluminum (Al), and gallium (Ga).

18. A display panel comprising:

an array substrate comprising;

a pixel defined by a plurality of data lines and a plurality of gate lines, wherein the data lines are oriented in a first direction and the gate lines are oriented in a second direction that crosses the first direction;

an organic thin film transistor formed in the pixel, wherein the organic thin film transistor comprises;

a source electrode electrically connected to one of the data lines,

a drain electrode, and

a gate electrode electrically connected to one of the gate lines;

a pixel electrode electrically connected to the drain electrode, wherein the pixel electrode comprises a transparent oxynitride;

a color filter substrate above with the array substrate; and

,

a liquid crystal layer interposed between the array substrate and the color filter substrate.

19. The display panel of claim 18, wherein the transparent oxynitride includes at least one selected from a group consisting of In, Sn, Zn, Al, and Ga.

20. The display panel of claim 18, wherein the pixel electrode includes a lower conductor including the transparent oxynitride and an upper conductor including a transparent oxide.

21. The display panel of claim 18, wherein the source electrode and the drain electrode comprises the transparent oxynitride.