Planar magnetic inductor and method for manufacturing the same

• US 20070159287A1
• Filed: 03/15/2007
• Published: 07/12/2007
• Est. Priority Date: 01/07/2005
• Status: Active Grant

• Current Assignee: Samsung Electro-Mechanics Co., Ltd. (Samsung Group)
• Original Assignee: Samsung Electro-Mechanics Co., Ltd. (Samsung Group)
• Inventors: Bae, Seok, Jung, Hyung, Moon, Jin, Yasuhiko, Mano
• Granted Patent: US 7,480,980 B2
• Time in Patent Office: Days
• US Class Current: 336/200
• CPC Class Codes: H01F 17/0006 Printed inductances printed coils for dynamo-electric machines H02K3/26; printed circuits H05K
• CPC Class Codes: H01F 41/046 structurally combined with ferromagnetic material
• CPC Class Codes: H01F 41/26 using electric currents , e.g. electroplating
• CPC Class Codes: H05K 1/0306 Inorganic insulating substrates, e.g. ceramic, glass
• CPC Class Codes: H05K 1/165 incorporating printed inductors
• CPC Class Codes: H05K 3/108 by semi-additive methods; masks therefor characterised by metallic etch mask H05K3/062; electroplating methods or apparatus H05K3/241
• CPC Class Codes: Y10T 29/4902 Electromagnet, transformer or inductor

Abstract

A planar magnetic inductor and a method for manufacturing the same are provided. The planar magnetic inductor comprises an insulating oxide magnetic layer formed on a substrate, a conductive coil separated from a lower surface of the insulating oxide magnetic layer while being completely embedded in the insulating oxide magnetic layer, and a cover layer formed on the insulating oxide magnetic layer for protecting the insulating oxide magnetic layer. The insulating oxide magnetic layer comprises a lower insulating oxide magnetic layer, and an upper insulating oxide magnetic layer formed on the lower insulating oxide magnetic layer, such that the conductive coil is completely embedded in the upper insulating oxide magnetic layer. The planar magnetic inductor can realize excellent high frequency characteristics and high inductance with a reduced scale.

Claims

1-9. -9. (canceled)

10. A method for manufacturing a planar magnetic inductor is provided, comprising:

forming a lower insulating oxide magnetic layer on a substrate;

forming a conductive coil on the lower insulating oxide magnetic layer;

forming an upper insulating oxide magnetic layer directly on the conductive coil such that the conductive coil is completely embedded in the upper insulating oxide magnetic layer; and

forming a cover layer on the upper insulating oxide magnetic layer.

11. The method as set forth in claim 10, wherein the upper and lower insulating oxide magnetic layers comprise an oxide magnetic material comprising at least two elements selected from the group comprising Fe, Ni, Zn, Mn, Mg, Co, Ba and Sr.

12. The method as set forth in claim 10, wherein the conductive coil is formed by electroplating.

13. The method as set forth in claim 12, wherein formation of the conductive coil comprises:

forming a coil-shaped photoresist layer pattern on the lower insulating oxide magnetic layer;

forming a coil-shaped plating seed layer pattern by use of the photoresist pattern; and

forming the conductive coil on the plating seed layer pattern by electroplating.

14. The method as set forth in claim 12, wherein formation of the conductive coil comprises:

forming the plating seed layer on the lower insulating oxide magnetic layer;

forming a photoresist layer mold having a coil-shaped pattern on the plating seed layer;

forming the conductive coil by electroplating using the photoresist layer mold as a mask; and

removing the photoresist layer mold and a portion of the plating seed layer under the photoresist layer mold.

15. The method as set forth in claim 10, wherein formation of the conductive coil comprises:

cladding a metallic thin film onto the lower insulating oxide magnetic layer by compression; and

performing selective chemical etching on the metallic thin film to form a coil pattern.

16. The inductor as set forth in claim 10, wherein formation of the conductive coil comprises:

forming a screen for a coil pattern on the lower insulating oxide magnetic layer; and

printing a conductive paste on the lower insulating oxide magnetic layer by using the screen as a print mask.

17. The method as set forth in claim 10, wherein formation of the conductive coil comprises:

printing a conductive paste in a slurry state on the lower insulating oxide magnetic layer by ink-jet printing.

18. The method as set forth in claim 10, wherein the lower and the upper insulating oxide magnetic layers are formed by ferrite plating.