MONOLITHIC MEMS-BASED WAVELENGTH-SELECTIVE SWITCHES AND CROSS CONNECTS
First Claim
1. A wavelength-selective switch for switching optical signals, comprising:
- an optical input port for receiving a wavelength division multiplexed (WDM) light beam;
at least one dispersive element to demultiplex the WDM light beam for producing a plurality of demultiplexed light beams;
a plurality of optical output ports for transmitting multiplexed light beams; and
a mirror array configured for redirecting each of said demultiplexed light beams to said optical output ports;
wherein said optical input and output ports comprise optical waveguides which are integrated with the above elements on the same monolithic substrate.
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Accused Products
Abstract
Wavelength-selective 1×N switches (WSSs) and N×N cross-connects (WSXCs) are described which are fabricated as monolithic or hybrid devices. In a preferred embodiment, the optic ports, dispersion elements, and collimating elements are formed on a single monolithic substrate. A micromirror and actuator are either fabricated within the substrate or a separate micromirror is utilized forming a hybrid WSS or WSXC. The optical elements can be formed in an opaque substrate layer (e.g., silicon, SOI, and so forth) or in an optically transparent layer of a PLC material (e.g., silica-on-silicon). Embodiments describe the use of linear and rotary comb drives for actuating front surface mirrors, or solid-immersion micromirrors (SIMs). The switching devices reduce system footprint while reducing or eliminating the need for alignment of the optical elements.
67 Citations
21 Claims
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1. A wavelength-selective switch for switching optical signals, comprising:
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an optical input port for receiving a wavelength division multiplexed (WDM) light beam;
at least one dispersive element to demultiplex the WDM light beam for producing a plurality of demultiplexed light beams;
a plurality of optical output ports for transmitting multiplexed light beams; and
a mirror array configured for redirecting each of said demultiplexed light beams to said optical output ports;
wherein said optical input and output ports comprise optical waveguides which are integrated with the above elements on the same monolithic substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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20. A wavelength-selective switch for switching optical signals within a monolithic device, comprising:
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a first waveguide configured for receiving a wavelength division multiplexed (WDM) light beam;
a first dispersive element to demultiplex the WDM light beam received from said first waveguide into a plurality of demultiplexed light beams;
at least one collimating element;
an array of movable mirrors configured for receiving light beams from said at least one collimating element and redirecting light beams through said at least one collimating element;
each of said movable mirrors comprising a reflective structure whose angular position is modulated in response to electrostatic actuation of linear or rotary comb-drives; and
at least a second and third waveguide configured for receiving light redirected from said array of movable mirrors through said at least one collimating element;
wherein the elements of the wavelength-selective switch are fabricated within a monolithic device.
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21. A wavelength-selective switch for switching optical signals within a monolithic device, comprising:
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a first waveguide configured for receiving a wavelength division multiplexed (WDM) light beam;
a first dispersive element configured for demultiplexing the light beam received from said first waveguide into a plurality of demultiplexed light beams;
at least one collimating element;
an array of movable mirrors configured for receiving light beams from said at least one collimating element and redirecting light beams through said at least one collimating element;
each of said movable mirrors comprising a solid immersion micromirror (SIM), said movable mirror configured for angular position modulation in response to actuation of electrostatic comb-drives; and
at least a second and third waveguide configured for receiving light redirected from said array of movable mirrors through said at least one collimating element;
wherein the elements of the wavelength-selective switch are fabricated on a planar lightwave circuit material having an optically transparent layer through which said optical signals are communicated.
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Specification