Method and apparatus to determine if a pattern is robustly manufacturable
First Claim
1. A method for determining if a pattern is robustly manufacturable, the method comprising:
- receiving a first pattern and a design intent, wherein the first pattern is intended to generate the design intent;
determining a second pattern using the design intent, wherein subjecting the second pattern to a second manufacturing process is expected to generate a third pattern that is substantially similar to the design intent;
determining a second indicator which indicates whether the second pattern is robustly manufacturable by a first semiconductor manufacturing process; and
using the second indicator to generate a first indicator that indicates whether the first pattern is robustly manufacturable.
1 Assignment
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Accused Products
Abstract
One embodiment provides a method to determine if a pattern is robustly manufacturable. During operation, the system may receive a first pattern and a design intent, wherein the first pattern is intended to generate the design intent. Next, the system may determine a second pattern using the design intent, wherein subjecting the second pattern to a second manufacturing process is expected to generate a third pattern that is substantially similar to the design intent. The system may then determine if a first semiconductor manufacturing process is capable of robustly manufacturing the second pattern. If the second pattern is not robustly manufacturable, the system may generate an indicator that indicates that the first pattern is not robustly manufacturable.
20 Citations
20 Claims
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1. A method for determining if a pattern is robustly manufacturable, the method comprising:
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receiving a first pattern and a design intent, wherein the first pattern is intended to generate the design intent;
determining a second pattern using the design intent, wherein subjecting the second pattern to a second manufacturing process is expected to generate a third pattern that is substantially similar to the design intent;
determining a second indicator which indicates whether the second pattern is robustly manufacturable by a first semiconductor manufacturing process; and
using the second indicator to generate a first indicator that indicates whether the first pattern is robustly manufacturable. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A computer-readable storage medium storing instructions that when executed by a computer cause the computer to perform a method for determining if a pattern is robustly manufacturable, the method comprising:
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receiving a first pattern and a design intent, wherein the first pattern is intended to generate the design intent;
determining a second pattern using the design intent, wherein subjecting the second pattern to a second manufacturing process is expected to generate a third pattern that is substantially similar to the design intent;
determining a second indicator which indicates whether the second pattern is robustly manufacturable by a first semiconductor manufacturing process; and
using the second indicator to generate a first indicator that indicates whether the first pattern is robustly manufacturable. - View Dependent Claims (9, 10, 11, 12, 13, 14)
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15. An apparatus for determining if a pattern is robustly manufacturable, the apparatus comprising:
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a receiving mechanism configured to receive a first pattern and a design intent, wherein the first pattern is intended to generate the design intent;
a first determining mechanism configured to determine a second pattern using the design intent, wherein subjecting the second pattern to a second manufacturing process is expected to generate a third pattern that is substantially similar to the design intent;
a second determining mechanism configured to determine a second indicator which indicates whether the second pattern is robustly manufacturable by a first semiconductor manufacturing process; and
a generating mechanism configured to use the second indicator to generate a first indicator that indicates whether the first pattern is robustly manufacturable. - View Dependent Claims (16, 17, 18, 19, 20)
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Specification