Quartz SAW sensor based on direct quartz bonding

• US 20070164633A1
• Filed: 01/13/2006
• Published: 07/19/2007
• Est. Priority Date: 01/13/2006
• Status: Abandoned Application

• Current Assignee: Honeywell International Inc.
• Original Assignee: Honeywell International Inc.
• Inventors: Cobianu, Cornel, Georgescu, Ion, Avramescu, Viorel
• Application Number:
  US11/331,632
• Publication Number:
  US 20070164633A1
• Time in Patent Office: Days
• US Class Current: 310/313.A
• CPC Class Codes: G01L 9/0025 with acoustic surface waves
• CPC Class Codes: G01L 9/008 using piezoelectric devices piezoelectric resonators G01L9/0022; surface acoustic waves G01L9/0025

Abstract

A SAW sensor module can be produced with a true all quartz sensor package (TAQSP) attached to a substrate. The TAQSP has a quartz cover direct quartz bonded to a SAW sensor on a quartz substrate. The TAQSP can be mass produced by direct quartz bonding a quartz cover wafer, having many covers, to a quartz sensor wafer, having many sensors, thereby producing a wafer tandem. The wafer tandem can be further processed because the bond protects the sensors within. Individual sensor packages can be obtained by cutting stripes out of the cover wafer, revealing SAW sensor bonding pads, and then dicing the wafer tandem. A SAW sensor module results when the sensor packages are attached to an antenna bearing substrate and then sealed.

Claims

1. A method comprising:

processing a quartz cover wafer to produce a sensor recess pattern and a stripe recess pattern wherein the sensor recess pattern comprises a multitude of sensor recesses, wherein the stripe recess pattern comprises a multitude of stripes, and wherein the stripe recess pattern is perpendicular and aligned with the sensor cavity pattern;

processing a SAW quartz wafer to produce a SAW sensor pattern comprising a multitude of SAW sensors;

aligning the quartz cover wafer and the SAW quartz wafer such that the multitude of SAW sensors align with multitude of sensor recesses;

direct quartz bonding the quartz cover wafer and the SAW quartz wafer such that all coincident quartz surfaces bond together and wherein the multitude of SAW sensors are sealed within the multitude of sensor recesses thereby producing a wafer tandem;

releasing quartz diaphragms by deep etching the SAW quartz wafer wherein only one side of the SAW quartz wafer can be etched because the other side is bonded to the quartz cover wafer, having a continuous bonded zone at the periphery of the tandem and having a metal layer mask deposited on all regions of wafer tandem that need protection during deep quartz etching;

removing the multitude of stripes out of the quartz cover wafer; and

dicing the wafer tandem to produce a multitude of covered SAW sensors.

2. The method of claim 1 wherein the multitude of stripes are removed from the quartz cover wafer by cutting along the edges of the stripes.

3. The method of claim 2 further comprising producing at least one alignment mark on the quartz cover wafer such that the edges of the stripes can be located.

4. The method of claim 3 wherein direct quartz bonding is performed by a series of steps comprising plasma treating the quartz surfaces that are to be bonded and pressing the plasma treated surfaces together.

5. The method of claim 3 wherein direct quartz bonding is performed by a series of steps comprising forming silanol groups on the surfaces to be bonded, pressing the surfaces to be bonded together, and then heating.

6. The method of claim 1 further comprising producing at least one alignment mark on the quartz cover wafer such that the edges of the stripes can be located.

7. The method of claim 1 wherein direct quartz bonding is performed by a series of steps comprising plasma treating the quartz surfaces that are to be bonded and pressing the plasma treated surfaces together.

8. The method of claim 1 wherein direct quartz bonding is performed by a series of steps comprising forming silanol groups on the surfaces to be bonded, pressing the surfaces to be bonded together, and then heating.

18. The system of claim 1 further comprising at least one alignment mark on the quartz cover wafer such that the stripes can be located inside the wafer tandem.

19. The system of claim 18 wherein the direct quartz bond is formed by producing reactive dangling bonds on the quartz surfaces that are to be bonded and pressing together the surfaces that are to be bonded.

20. The system of claim 18 wherein the direct quartz bond is formed by producing silanol groups on the surfaces to be bonded, pressing the surfaces to be bonded together, and then heating in order to obtain Si—

O—

Si covalent bonds responsible for direct bonding.

9. A method comprising:

processing a quartz cover wafer to produce a sensor recess pattern and a stripe recess pattern wherein the sensor overlay pattern comprises a multitude of sensor recesses, wherein the stripe recess pattern comprises a multitude of stripes, and wherein the stripe recess pattern is perpendicular and aligned with the sensor cavity pattern;

processing a SAW quartz wafer to produce a SAW sensor pattern comprising a multitude of SAW sensors;

aligning the quartz cover wafer and the SAW quartz wafer such that the multitude of SAW sensors align with the multitude of sensor recesses;

direct quartz bonding the quartz cover wafer and the SAW quartz wafer such that all coincident quartz surfaces bond together and wherein the multitude of SAW sensors are sealed within the multitude of sensor recesses thereby producing a wafer tandem;

releasing the quartz diaphragm by deep etching the SAW quartz wafer wherein only one side of the SAW quartz wafer can be etched because the other side is bonded to the quartz cover wafer, wherein the periphery of the wafer tandem is continuously bonded on the whole edge, and wherein the outer surface of the quartz cover wafer and the surviving backside of the SAW quartz wafer are protected with metal masking layers;

sawing the multitude of stripes out of the quartz cover wafer;

dicing the wafer tandem to produce a multitude of covered SAW sensors,

patterning a substrate to produce at least one antenna electrically connected to at least one bonding pad;

attaching one of the multitude of covered SAW sensors to the substrate wherein the SAW sensor is bonded to at least one of the at least one bonding pad to produce a SAW sensor module;

sealing the SAW sensor module;

10. The method of claim 9 further comprising gel filling the SAW sensor module.

11. The method of claim 10 further comprising producing at least one alignment mark on the quartz cover wafer such that the stripes can be located.

12. The method of claim 11 wherein direct quartz bonding is performed by a series of steps comprising plasma treating the quartz surfaces that are to be bonded and pressing the plasma treated surfaces together.

13. The method of claim 11 wherein direct quartz bonding is performed by a series of steps comprising forming silanol groups on the surfaces to be bonded, pressing the surfaces to be bonded together, and then heating.

14. The method of claim 9 further comprising producing at least one alignment mark on the quartz cover wafer such that the multitude of stripe recesses can be located.

15. The method of claim 9 wherein direct quartz bonding is performed by a series of steps comprising plasma treating the quartz surfaces that are to be bonded and pressing the plasma treated surfaces together.

16. The method of claim 9 wherein direct quartz bonding is performed by a series of steps comprising forming silanol groups on the surfaces to be bonded, pressing the surfaces to be bonded together, and then heating.

17. A system comprising:

a quartz cover wafer comprising a sensor recess pattern and a stripe recess pattern wherein the sensor recess pattern comprises a multitude of sensor recesses, wherein the stripe recess pattern comprises a multitude of stripes, and wherein the stripe recess pattern is perpendicular and aligned with the sensor cavity pattern;

a SAW quartz wafer comprising a SAW sensor pattern comprising a multitude of SAW sensors; and

a direct quartz bond wherein the quartz cover wafer and the SAW quartz wafer are direct quartz bonded wherein the multitude of SAW sensors align with the multitude of sensor recesses, wherein all coincident quartz surfaces bond together, and wherein the multitude of SAW sensors are sealed within the multitude of sensor recesses thereby providing a wafer tandem.