Lithographic apparatus having a controlled motor, and motor control system and method
First Claim
1. A lithographic apparatus, comprising:
- an illumination system configured to condition a radiation beam;
a patterning support constructed to hold a patterning device, the patterning device being capable of imparting the radiation beam with a pattern in its cross-section to form a patterned radiation beam;
a substrate support constructed to hold a substrate;
a projection system configured to project the patterned radiation beam onto a target portion of the substrate; and
a positioning system to position the patterning support, the substrate support, or both, the positioning system comprising a motor with a stator and a mover that is coupled to one of the patterning support and the substrate support, and an associated motor control system having a controller configured to provide an output to control a current applied to the motor, wherein the motor control system is configured to;
(a) determine a controller output that is adapted to compensate for a weight of the mover and associated support;
(b) determine a deviation of the output obtained under (a) from an output that is adapted to compensate a gravity force acting on the mover and associated support; and
(c) correct the current applied to the motor based on the deviation obtained under (b).
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Accused Products
Abstract
A lithographic apparatus includes an illumination system to condition a radiation beam. A patterning support holds a patterning device that imparts the radiation beam with a pattern to form a patterned radiation beam. A substrate support holds a substrate. A projection system projects the patterned radiation beam onto the substrate. A positioning system positions the patterning support and the substrate support. The positioning system has a motor with a stator and a mover coupled to a support, and an associated motor control system with a controller providing an output for controlling currents applied to the motor. The motor control system determines a controller output required to compensate for a weight of mover and associated support, determines a deviation of this output from an output required to compensate the gravity force acting on the mover and associated support, and corrects the currents applied to the motor based on the deviation.
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Citations
21 Claims
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1. A lithographic apparatus, comprising:
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an illumination system configured to condition a radiation beam;
a patterning support constructed to hold a patterning device, the patterning device being capable of imparting the radiation beam with a pattern in its cross-section to form a patterned radiation beam;
a substrate support constructed to hold a substrate;
a projection system configured to project the patterned radiation beam onto a target portion of the substrate; and
a positioning system to position the patterning support, the substrate support, or both, the positioning system comprising a motor with a stator and a mover that is coupled to one of the patterning support and the substrate support, and an associated motor control system having a controller configured to provide an output to control a current applied to the motor, wherein the motor control system is configured to;
(a) determine a controller output that is adapted to compensate for a weight of the mover and associated support;
(b) determine a deviation of the output obtained under (a) from an output that is adapted to compensate a gravity force acting on the mover and associated support; and
(c) correct the current applied to the motor based on the deviation obtained under (b). - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A positioning system, comprising:
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a motor with a stator and a mover that is coupled to an object, and an associated motor control system having a controller configured to provide an output to control a current applied to the motor, wherein the motor control system is configured to;
(a) determine a controller output that is adapted to compensate for a weight of the mover and the object;
(b) determine a deviation of the output obtained under (a) from an output that is adapted to compensate a gravity force acting on the mover and the object; and
(c) correct the current applied to the motor based on the deviation obtained under (b). - View Dependent Claims (14, 15)
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16. A method of controlling a motor with a stator and a mover that is coupled to an object, the method comprising:
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(a) providing an output, by a controller, to control a current applied to the motor;
(b) determining a controller output that is adapted to compensate for a weight of the mover and the object;
(c) determining a deviation of the output obtained under (b) from an output that is adapted to compensate a gravity force acting on the mover and the object; and
(d) correcting the current applied to the motor based on the deviation obtained under (c). - View Dependent Claims (17, 18)
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19. A computer program including program instructions executable by a motor positioning system to control a planar motor with a stator and a mover coupled to an object, the motor positioning system having an associated motor control system having a controller configured to provide an output to control a current applied to the motor, said instructions upon execution instructing the motor positioning system to:
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(a) determine a controller output that is adapted to compensate for a weight of the mover and the object;
(b) determine a deviation of the output obtained under (a) from an output that is adapted to compensate a gravity force acting on the mover and the object; and
(c) correct the current applied to the motor based on the deviation obtained under (b). - View Dependent Claims (20, 21)
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Specification