Vaporizer, film forming apparatus including the same, method of vaporization and method of forming film
First Claim
1. A vaporization apparatus for introducing a carrier gas from one end of a gas passage and for feeding, the carrier gas including a material solution, from the other end of the gas passage to a vaporization part to thereby vaporize the material solution, characterized in that a mass flow controller (MFC) is provided at the one end of said gas passage, and means (hereinafter called “
- pressure detection means”
) for detecting a pressure within said gas passage is provided.
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Accused Products
Abstract
It is aimed at providing a vaporization apparatus and a vaporization method capable of keeping track of a progressive condition of clogging of the apparatus. It is also aimed at providing a vaporization apparatus and a vaporization method capable of eliminating clogging prior to occurrence of complete clogging, without disassembling the apparatus. It provides a vaporization apparatus for introducing a carrier gas from one end of a gas passage and for feeding, the carrier gas including a material solution, from the other end of the gas passage to a vaporization part to thereby vaporize the material solution, characterized in that a mass flow controller (MFC) is provided at the one end of the gas passage, and means for detecting a pressure within the gas passage is provided. The vaporization apparatus is characterized in that the same is provided with means for introducing a chemical solution capable of dissolving therein matters deposited or sticked to the inside of the gas passage, into the gas passage.
404 Citations
18 Claims
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1. A vaporization apparatus for introducing a carrier gas from one end of a gas passage and for feeding, the carrier gas including a material solution, from the other end of the gas passage to a vaporization part to thereby vaporize the material solution, characterized in that a mass flow controller (MFC) is provided at the one end of said gas passage, and means (hereinafter called “
- pressure detection means”
) for detecting a pressure within said gas passage is provided. - View Dependent Claims (2, 3, 4, 5, 6, 13, 14, 17, 18)
- pressure detection means”
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7. A vaporization method for introducing a carrier gas from one end of a gas passage and for feeding, the carrier gas including a material solution, from the other end of the gas passage to a vaporization part to thereby vaporize the material solution, characterized in that said method comprises the steps of:
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providing a mass flow controller (MFC) at the one end of the gas passage, and conducting vaporization while detecting a pressure within the gas passage. - View Dependent Claims (8, 9, 10, 11, 12, 15, 16)
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Specification