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Vaporizer, film forming apparatus including the same, method of vaporization and method of forming film

  • US 20070166457A1
  • Filed: 03/08/2004
  • Published: 07/19/2007
  • Est. Priority Date: 03/07/2003
  • Status: Abandoned Application
First Claim
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1. A vaporization apparatus for introducing a carrier gas from one end of a gas passage and for feeding, the carrier gas including a material solution, from the other end of the gas passage to a vaporization part to thereby vaporize the material solution, characterized in that a mass flow controller (MFC) is provided at the one end of said gas passage, and means (hereinafter called “

  • pressure detection means”

    ) for detecting a pressure within said gas passage is provided.

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