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Process for producing a photoelectric conversion device

  • US 20070166959A1
  • Filed: 03/23/2007
  • Published: 07/19/2007
  • Est. Priority Date: 01/30/2001
  • Status: Active Grant
First Claim
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1. A process for producing a semiconductor device, comprising:

  • forming a first semiconductor film having an amorphous structure;

    adding an element for promoting crystallization to the first semiconductor film having the amorphous structure;

    conducting a first heat treatment to form a first semiconductor film having a crystal structure;

    forming a second semiconductor film containing a rare gas element over the first semiconductor film having the crystal structure;

    conducting a second heat treatment to segregate the element for promoting crystallization into the second semiconductor film; and

    removing the second semiconductor film, wherein the second heat treatment is conducted by rapid thermal annealing.

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