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Pressure sensor fault detection

  • US 20070169557A1
  • Filed: 01/26/2006
  • Published: 07/26/2007
  • Est. Priority Date: 01/26/2006
  • Status: Active Grant
First Claim
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1. A diagnostic system for a pressure sensor, comprising:

  • a cavity configured to receive an applied pressure, the cavity having a first and a second wall;

    a deflectable diaphragm in the cavity configured to form a first and a second capacitance with the first wall and a third and a fourth capacitance with the second wall which change in response to the applied pressure, the first and third capacitances forming a first transfer function and the second and the fourth capacitances forming a second transfer function; and

    circuitry configured to provide a diagnostic output as a function of the first and second transfer functions.

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