Method and Apparatus for Depositing a Magnetoresistive Multilayer Film
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Abstract
This application discloses a method and apparatus for manufacturing a magnetoresistive multilayer film having a structure where an antiferromagnetic layer, a pinned-magnetization layer, a nonmagnetic spacer layer and a free-magnetization layer are laminated on a substrate in this order. A film for the antiferromagnetic layer is deposited by sputtering as oxygen gas is added to a gas for the sputtering. A film for an extra layer interposed between the substrate and the antiferromagnetic layer is deposited by sputtering as oxygen gas is added to a gas for the sputtering. The film for the antiferromagnetic layer is deposited by sputtering as a gas mixture of argon and another gas of larger atomic number than argon is used.
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Citations
16 Claims
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1-10. -10. (canceled)
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11. A system for manufacturing a magnetoresistive multilayer film having a structure where an antiferromagnetic layer, a pinned-magnetization layer, a nonmagnetic spacer layer and a free-magnetization layer are laminated in this order;
- comprising
a chamber for depositing a film for the antiferromagnetic layer on a substrate by sputtering;
a pumping line evacuating the chamber; and
a gas introduction line introducing a gas for the sputtering into the chamber;
the gas introduction line being capable of adding oxygen gas to the gas for the sputtering.
- comprising
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12. A system for manufacturing a magnetoresistive multilayer film having a structure where an antiferromagnetic layer, a pinned-magnetization layer, a nonmagnetic spacer layer and a free-magnetization layer are laminated in this order;
- comprising
a chamber for depositing a film for the antiferromagnetic layer on a substrate by sputtering;
a pumping line evacuating the chamber; and
a gas introduction line introducing a gas mixture for the sputtering into the chamber;
the gas mixture being of argon and a gas of atomic number larger than argon. - View Dependent Claims (13, 14, 15, 16)
- comprising
Specification