Advanced ceramic heater for substrate processing
First Claim
1. A susceptor comprising:
- a substrate support member including a ceramic material having a first coefficient of thermal expansion;
a shaft including a chamber mount and a thermal barrier layer having a second coefficient of thermal expansion; and
a CTE-matching layer disposed between the ceramic material and the chamber mount, bonded to the ceramic material, and having a third coefficient of thermal expansion between the first and second coefficients of thermal expansion, the thermal barrier layer being disposed between the chamber mount and the CTE-matching layer.
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Accused Products
Abstract
Susceptors are provided that employ layers of CTE-matching materials to reduce the stresses that otherwise lead to cracking and failure. Exemplary CTE-matching materials include metal alloys of aluminum and silicon that can be tailored to specific CTE values by adjusting the ratio of the elements. An exemplary susceptor comprises a CTE-matching material that accommodates the differences in the CTEs of a ceramic material and a thermal barrier layer disposed on opposite sides of the CTE-matching material. Methods are also provided for forming susceptors. These methods comprise assembling the components and bonding the assembly together, such as by diffusion bonding, to produce a susceptor that is a monolithic body.
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Citations
17 Claims
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1. A susceptor comprising:
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a substrate support member including a ceramic material having a first coefficient of thermal expansion; a shaft including a chamber mount and a thermal barrier layer having a second coefficient of thermal expansion; and a CTE-matching layer disposed between the ceramic material and the chamber mount, bonded to the ceramic material, and having a third coefficient of thermal expansion between the first and second coefficients of thermal expansion, the thermal barrier layer being disposed between the chamber mount and the CTE-matching layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17-28. -28. (canceled)
Specification