Solar cell production using non-contact patterning and direct-write metallization

• US 20070169806A1
• Filed: 01/20/2006
• Published: 07/26/2007
• Est. Priority Date: 01/20/2006
• Status: Abandoned Application

• Current Assignee: Palo Alto Research Center, Inc. (Xerox Holdings Corp.)
• Original Assignee: Palo Alto Research Center, Inc. (Xerox Holdings Corp.)
• Inventors: Arias, Ana, Maeda, Patrick, Fork, David, Curry, Douglas
• Application Number:
  US11/336,714
• Publication Number:
  US 20070169806A1
• Time in Patent Office: Days
• US Class Current: 136/256
• CPC Class Codes: H01L 31/022425 for solar cells
• CPC Class Codes: H01L 31/1876 Particular processes or apparatus for batch treatment of the devices
• CPC Class Codes: Y02E 10/50 Photovoltaic [PV] energy
• CPC Class Codes: Y02E 10/547 Monocrystalline silicon PV cells
• CPC Class Codes: Y02P 70/50 Manufacturing or production processes characterised by the final manufactured product

Abstract

Photovoltaic devices (i.e., solar cells) are formed using non-contact patterning apparatus (e.g., a laser-based patterning systems) to define contact openings through a passivation layer, and direct-write metallization apparatus (e.g., an inkjet-type printing or extrusion-type deposition apparatus) to deposit metallization into the contact openings and over the passivation surface. The metallization includes two portions: a contact (e.g., silicide-producing) material is deposited into the contact openings, then a highly conductive metal is deposited on the contact material and between the contact holes. The device wafers are transported between the patterning and metallization apparatus in hard tooled registration using a conveyor mechanism. Optional sensors are utilized to align the patterning and metallization apparatus to the contact openings. An extrusion-type apparatus is used to form grid lines having a high aspect central metal line that is supported on each side by a transparent material.

Claims

1. A method for producing a photovoltaic device, the photovoltaic device including a semiconductor wafer, one or more doped regions formed in a surface of the semiconductor wafer, and a plurality of conductive lines disposed over the surface of the semiconductor wafer and contacting said one or more doped regions, the method comprising:

forming a blanket passivation layer on the surface of the semiconductor wafer;

utilizing a non-contact patterning apparatus to define a plurality of openings through the passivation layer, whereby each said opening exposes a corresponding one of said one or more regions on the surface of the semiconductor wafer; and

utilizing a direct-write metallization apparatus to deposit a contact portion of said conductive lines into each of the plurality of openings.

2. The method according to claim 1, wherein utilizing the non-contact patterning apparatus comprises controlling a laser to generate a plurality of high energy laser pulses such that each said high energy laser pulse ablates said passivation layer to produce a corresponding one of said openings.

3. The method according to claim 2, wherein controlling the laser comprises directing the laser beam onto a rotating mirror such that the plurality of laser pulses are directed in a predetermined scan pattern on the passivation layer.

4. The method according to claim 3,

wherein the solar power generating device comprises a front surface contact cell including a plurality of parallel grid lines disposed over the surface of the semiconductor wafer, and

wherein controlling the laser comprises directing the laser beam such that the predetermined scan pattern defined by a main scanning direction of the rotating mirror is parallel to the plurality of grid lines.

5. The method according to claim 2, wherein controlling the laser comprises using information about the velocity that a laser spot generated by the laser is scanning on the passivation layer, and controlling a high energy laser to produce high energy ablation pulses that are co-incident with a predetermined scan position.

6. The method according to claim 5, where the high energy laser comprises a femtosecond laser.

7. The method according to claim 5, wherein using information about the velocity that the laser spot is scanning comprises one of information about the non-linear scan speed and information about the polygon rotation rate.

8. The method according to claim 5, wherein producing high energy ablation pulses that are co-incident with a predetermined scan position produces pulses that are co-incident with a metallization grid.

9. The method according to claim 1, wherein utilizing the direct-write metallization apparatus to deposit the contact portion into each of the plurality of openings comprises depositing a first, silicide-forming metal into each of the openings.

10. The method according to claim 1, wherein utilizing the direct-write metallization apparatus further comprises depositing a second metal onto the first metal, wherein the second metal has a greater electrical conductivity than the first metal.

11. The method according to claim 1, wherein utilizing the direct-write metallization apparatus to deposit the contact portion comprises utilizing at least one of an inkjet-type printhead and a dispensing nozzle.

12. The method according to claim 11, wherein utilizing the direct-write metallization apparatus to deposit the contact portion comprises printing a seedlayer inside each opening and in a predetermined pattern on the passivation layer, and

wherein the method further comprises electroless plating a second metal onto the seedlayer.

13. The method according to claim 11, wherein utilizing the direct-write metallization apparatus to deposit the contact portion comprises utilizing the extrusion-type dispensing nozzle to simultaneously deposit a lower metal layer on the surface of the semiconductor wafer inside each said opening, and an upper metal layer on the lower metal layer.

14. The method according to claim 13, wherein depositing the lower metal layer comprises depositing a first paste comprising nickel, and depositing the upper metal layer comprises depositing a second paste comprising one of silver and copper.

15. The method according to claim 13, wherein simultaneously depositing the lower and upper metal layers further comprises simultaneously depositing a solder wetting material over the second metal layer.

16. The method according to claim 11, wherein utilizing said at least one of an inkjet print head and a dispensing nozzle further comprises:

utilizing a first direct-write metallization apparatus to deposit said contact portion into each of the plurality of openings; and

subsequently utilizing a second direct-write metallization apparatus to depositing said conductive lines onto said contact portions.

17. The method according to claim 11, wherein the solar power generating device comprises a backside contact cell.

18. The method according to claim 1, wherein the semiconductor wafer comprises one of crystalline silicon, amorphous silicon, CdTe, or CIGS (copper-indium-gallium-diselenide).

19. A system for producing a photovoltaic device, the photovoltaic device including a semiconductor wafer, one or more doped regions formed in a surface of the semiconductor wafer, and a plurality of conductive lines disposed over the surface of the semiconductor wafer and contacting said one or more doped regions, the system comprising:

a non-contact patterning apparatus for defining a plurality of openings through a blanket passivation layer formed on the semiconductor wafer, whereby each said opening exposes a corresponding one of said one or more regions on the surface of the semiconductor wafer;

a direct-write metallization apparatus for depositing a contact portion of said conductive lines into each of the plurality of openings; and

a conveyor mechanism for supporting the wafer during processing by both the non-contact patterning apparatus and the direct-write metallization apparatus, and for conveying the wafer between the non-contact patterning apparatus and the direct-write metallization apparatus.

20. The system according to claim 19, wherein the non-contact patterning apparatus, the direct-write metallization apparatus and the conveyor mechanism are fixed attached to a base, and the conveyor mechanism includes means for securing the semiconductor wafer such that the semiconductor wafer maintains a hard tooled fixed registration relative to the non-contact patterning apparatus and the direct-write metallization apparatus during conveyance between the non-contact patterning apparatus and the direct-write metallization apparatus.

21. The system according to claim 20, further comprising means for coordinating a location of each contact opening generated by the non-contact patterning apparatus with an expected position of a contact portion deposited by the direct-write metallization apparatus.

22. The system according to claim 19, further comprising means for coordinating a location of each contact opening generated by the non-contact patterning apparatus with an expected position of a contact portion deposited by the direct-write metallization apparatus.

23. A front surface contact-type photovoltaic device comprising a semiconductor wafer, a passivation layer formed on a surface of the semiconductor wafer, and a plurality of grid lines formed on the passivation layer and connected by contact portions extending through openings in the passivation layer to a surface of the semiconductor wafer,

wherein each grid line comprises an elongated metal structure having a relatively small width and a relatively large height extending upward from the passivation layer, and at least one support portion formed along a side edge of the metal line, and

wherein the support portion comprises a transparent material.

24. The front surface contact-type photovoltaic device of claim 23, further comprising an elongated contact metal layer formed between the passivation layer and a lower surface of the central metal structure.