Systems and methods for integrating focal plane arrays
First Claim
Patent Images
16. A detector element, comprising:
- a substrate;
read out integrated circuitry (ROIC) disposed on said substrate, said ROIC including visible imaging circuitry configured to detect visible spectrum radiation;
a substantially planar infrared detector membrane, said membrane having a planar upper surface, said membrane having at least one opening defined therein that is configured to allow visible radiation to reach said visible imaging circuitry through said membrane; and
at least one thermal isolation leg supporting said infrared detector membrane in a position that is spaced above said substrate, said thermal isolation leg having a first end positioned proximal to said membrane and a second end positioned distal to said membrane, an upper surface of said first end of said thermal isolation leg being configured to lie in the same plane as the upper surface of said second end of said thermal isolation leg;
wherein a substantial entirety of the upper surface of said at least one thermal isolation leg is substantially planar and is oriented in substantially parallel and substantially coplanar relationship with said planar upper surface of said substantially planar infrared detector membrane.
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Abstract
Systems and methods for providing multi-spectral image capability using an integrated multi-band focal plane array that, in one example, may be employed to simultaneously image in the visible spectrum and infrared spectrum using an integrated dual-band focal plane array, e.g., by including visible imaging circuitry within read out integrated circuitry (ROIC) used to readout infrared detector elements within the same pixel element/s.
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Citations
47 Claims
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16. A detector element, comprising:
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a substrate; read out integrated circuitry (ROIC) disposed on said substrate, said ROIC including visible imaging circuitry configured to detect visible spectrum radiation; a substantially planar infrared detector membrane, said membrane having a planar upper surface, said membrane having at least one opening defined therein that is configured to allow visible radiation to reach said visible imaging circuitry through said membrane; and at least one thermal isolation leg supporting said infrared detector membrane in a position that is spaced above said substrate, said thermal isolation leg having a first end positioned proximal to said membrane and a second end positioned distal to said membrane, an upper surface of said first end of said thermal isolation leg being configured to lie in the same plane as the upper surface of said second end of said thermal isolation leg; wherein a substantial entirety of the upper surface of said at least one thermal isolation leg is substantially planar and is oriented in substantially parallel and substantially coplanar relationship with said planar upper surface of said substantially planar infrared detector membrane. - View Dependent Claims (17, 18, 19, 20, 21, 22)
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23. A focal plane array assembly, comprising:
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a substrate; and a plurality of multi-band detector elements, each of said plurality of multi-band detector elements comprising a membrane suspended over said substrate and read out integrated circuitry (ROIC) disposed on said substrate, said ROIC including visible imaging circuitry; wherein said membrane of each of said multi-band detector elements has at least one opening defined therein and is configured to allow visible spectrum radiation to reach said visible imaging circuitry through said membrane. - View Dependent Claims (24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 39)
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36. A method of making a focal plane array assembly, comprising:
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providing a substrate; forming read out integrated circuitry (ROIC) on said first side of said substrate, said ROIC including visible imaging circuitry; forming a plurality of membrane structures on said substrate so that each of said membrane structures is suspended over said substrate with said ROIC disposed on said substrate; and forming at least one opening in each of said plurality of membrane structures, said opening being configured to allow visible spectrum radiation to reach said visible imaging circuitry through said membrane. - View Dependent Claims (37, 38, 40, 41, 42, 43)
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44. A multi-band detector element, comprising:
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a substrate; a first radiation detector structure disposed on said substrate, said first radiation detector structure configured to detect a radiation having a first wavelength; and a second radiation detector structure configured to absorb radiation having a second wavelength. - View Dependent Claims (1, 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 45, 46, 47)
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46-1. The detector element of claim 44, where said first radiation detector structure comprises circuitry on said substrate configured to detect visible and near infrared radiation;
- and wherein said second radiation detector structure comprises a bolometer structure configured to detect infrared radiation.
Specification