Method of fabricating semiconductor device
First Claim
1. A method of fabricating a semiconductor device, comprising:
- forming an interlayer insulating film on a semiconductor substrate;
depositing a first soft magnetic thin film on the interlayer insulating film through sputtering using a target comprising at least one of Fe, Co, Ni, or alloys thereof, the target further comprising at least one of Ti, Hf, or B, the sputtering being performed using N2 reactive gas;
forming a metal film on the first soft magnetic thin film;
depositing a second soft magnetic thin film on the metal film through sputtering using the same or another target comprising at least one of Fe, Co, Ni, or alloys thereof, the target further comprising at least one of Ti, Hf, or B, the sputtering being performed using N2 reactive gas; and
patterning the first soft magnetic thin film, the metal film, and the second soft magnetic thin film, which are laminated, using a same mask, to form an inductor.
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Accused Products
Abstract
A semiconductor device and a method of fabricating a semiconductor device that includes forming an interlayer insulating film on a semiconductor substrate; depositing a first soft magnetic thin film on the interlayer insulating film through sputtering using a target containing at least one of Fe, Co, Ni, or alloys thereof, the target further containing at least one of Ti, Hf, or B, the sputtering being performed using an N2 reactive gas; forming a metal film on the first soft magnetic thin film; depositing a second soft magnetic thin film on the metal film through sputtering using the same or another target containing at least one of Fe, Co, Ni, or alloys thereof, the target further containing at least one of Ti, Hf, or B, the sputtering being performed using an N2 reactive gas; and patterning to form an inductor.
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Citations
20 Claims
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1. A method of fabricating a semiconductor device, comprising:
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forming an interlayer insulating film on a semiconductor substrate; depositing a first soft magnetic thin film on the interlayer insulating film through sputtering using a target comprising at least one of Fe, Co, Ni, or alloys thereof, the target further comprising at least one of Ti, Hf, or B, the sputtering being performed using N2 reactive gas; forming a metal film on the first soft magnetic thin film; depositing a second soft magnetic thin film on the metal film through sputtering using the same or another target comprising at least one of Fe, Co, Ni, or alloys thereof, the target further comprising at least one of Ti, Hf, or B, the sputtering being performed using N2 reactive gas; and patterning the first soft magnetic thin film, the metal film, and the second soft magnetic thin film, which are laminated, using a same mask, to form an inductor. - View Dependent Claims (2, 3, 4, 5)
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6. A method of fabricating a semiconductor device, the method comprising:
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forming an interlayer insulating film having a plurality of lower wire layers on a semiconductor substrate; depositing a first soft magnetic thin film on the interlayer insulating film through sputtering using a target comprising at least one of Fe, Co, Ni, or alloys thereof, the target further comprising at least one of Ti, Hf, or B, the sputtering being performed using N2 reactive gas; forming an uppermost metal wire layer on the first soft magnetic thin film; depositing a second soft magnetic thin film on the uppermost metal wire layer through sputtering using the same or another target comprising at least one of Fe, Co, Ni, or alloys thereof, the target further comprising at least one of Ti, Hf, or B, the sputtering being performed using N2 reactive gas; and patterning the first soft magnetic thin film, the uppermost metal wire layer, and the second soft magnetic thin film, which are laminated, using a same mask, thus forming an inductor and the uppermost wire layer coupled with at least one of the lower wire layers. - View Dependent Claims (7, 8, 9, 10)
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11. A semiconductor device, comprising:
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an interlayer insulating film formed on a semiconductor substrate; and an inductor provided on the interlayer insulating film, the inductor comprising; a first soft magnetic thin film pattern formed on the interlayer insulating film, the first soft magnetic film comprising;
a) at least one material selected from Fe, Co, Ni, or alloys thereof;
b) at least one element selected from Ti, Hf, or B, and c) N;a metal film pattern on the first soft magnetic thin film pattern; and a second soft magnetic thin film pattern on the metal film pattern, the second soft magnetic thin film pattern comprising a) at least one material selected from Fe, Co, Ni, or alloys thereof;
b) at least one element selected from Ti, Hf, or B; and
c) N. - View Dependent Claims (12, 13, 14, 15)
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16. A semiconductor device, comprising:
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an interlayer insulating film on a semiconductor substrate and having a plurality of lower wire layers; and an inductor and an uppermost wire layer coupled with a lower wire layer on the interlayer insulating film, the inductor and the uppermost wire layer each comprising a first soft magnetic thin film pattern which is formed on the interlayer insulating film, the first soft magnetic film pattern comprising;
a) at least one of Fe, Co, Ni, or alloys thereof;
b) at least one element selected from Ti, Hf, or B; and
c) N;a metal film pattern formed on the first soft magnetic thin film pattern; and a second soft magnetic thin film pattern formed on the metal film pattern, the second soft magnetic film pattern comprising;
a) at least one of Fe, Co, Ni, or alloys thereof;
b) at least one element selected from Ti, Hf, or B; and
c) N. - View Dependent Claims (17, 18, 19, 20)
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Specification