SYSTEM APPARATUS AND METHODS FOR PROCESSING SUBSTRATES USING ACOUSTIC ENERGY
First Claim
Patent Images
1. A transducer assembly for processing substrates comprising:
- a crystal or ceramic adapted to convert electrical energy into sonic energy, the crystal or ceramic having a first conductive surface; and
a transmitter made of an inert non-reactive plastic for transmitting sonic energy generated by the crystal or ceramic, the transmitter having a first surface bonded directly to the first conductive surface of the crystal or ceramic.
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Abstract
A wafer cleaning system having a crystal or ceramic transducer assembly. The transducer assembly is adapted to convert electrical energy into sonic energy. The crystal or ceramic has a first conductive surface. The transducer assembly also has a transmitter made of an inert non-reactive plastic that transmits the sonic energy generated by the crystal or ceramic. The transmitter has a surface bonded directly to the conductive surface of the crystal or ceramic.
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Citations
28 Claims
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1. A transducer assembly for processing substrates comprising:
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a crystal or ceramic adapted to convert electrical energy into sonic energy, the crystal or ceramic having a first conductive surface; and
a transmitter made of an inert non-reactive plastic for transmitting sonic energy generated by the crystal or ceramic, the transmitter having a first surface bonded directly to the first conductive surface of the crystal or ceramic. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25)
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26. A system for processing a substrate comprising:
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means for supporting at least one substrate;
means for supplying a process fluid to the at least one substrate; and
a transducer assembly comprising a crystal or ceramic adapted to convert electrical energy into sonic energy, the crystal or ceramic having a first conductive surface, and a transmitter made of an inert non-reactive plastic for transmitting sonic energy generated by the crystal or ceramic, the transmitter having a first surface bonded directly to the first conductive surface of the crystal or ceramic and a second surface in contact with the process fluid. - View Dependent Claims (27)
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28. A method for processing a substrate comprising:
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a) supporting a substrate;
b) contacting a first surface of a substrate with a process fluid;
c) providing a transducer assembly comprising a crystal or ceramic adapted to convert electrical energy into sonic energy, the crystal or ceramic having a first conductive surface, and a transmitter made of an inert non-reactive plastic for transmitting sonic energy generated by the crystal or ceramic, the transmitter having a first surface bonded directly to the first conductive surface of the crystal or ceramic and a second surface;
d) positioning the transducer assembly so that at least a portion of the second surface of the transmitter is in contact with the process fluid; and
e) applying an electrical signal to the crystal or ceramic so that sonic energy is created by the crystal or ceramic and transmitted by the transmitter into the process fluid and to the first surface of the substrate.
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Specification