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SYSTEM APPARATUS AND METHODS FOR PROCESSING SUBSTRATES USING ACOUSTIC ENERGY

  • US 20070170812A1
  • Filed: 01/22/2007
  • Published: 07/26/2007
  • Est. Priority Date: 01/20/2006
  • Status: Abandoned Application
First Claim
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1. A transducer assembly for processing substrates comprising:

  • a crystal or ceramic adapted to convert electrical energy into sonic energy, the crystal or ceramic having a first conductive surface; and

    a transmitter made of an inert non-reactive plastic for transmitting sonic energy generated by the crystal or ceramic, the transmitter having a first surface bonded directly to the first conductive surface of the crystal or ceramic.

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