Reflective spatial light modulator
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Accused Products
Abstract
A micro-mirror array that is useful, for example, in a reflective spatial light modulator. In one embodiment, the micro mirror array includes spacer support walls, a vertical torsion hinge, and a mirror plate, all being fabricated from a single wafer. The micro-mirror array has a large fill ratio.
9 Citations
17 Claims
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1-7. -7. (canceled)
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8. An array of a plurality of micro mirrors, comprising:
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a frame with walls defining a plurality of cavities, each cavity corresponding to one of the plurality of micro mirrors;
a plurality of mirror plates defining an upper side of the plurality of cavities;
a plurality of hinges, each hinge connected to at least one wall of the frame and connected to a mirror plate of the plurality of mirror plates for allowing that mirror plate to rotate relative to the frame about an axis defined by the hinge; and
wherein the frame, the plurality of mirror plates, and the plurality of hinges are fabricated from a single continuous piece of material. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15, 16)
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17-20. -20. (canceled)
Specification