Method for packing solid organometallic compound and packed container

• US 20070175397A1
• Filed: 01/27/2006
• Published: 08/02/2007
• Est. Priority Date: 01/27/2006
• Status: Active Grant

• Current Assignee: Tosoh Finechem Corporation (Tosoh Corporation)
• Original Assignee: Tosoh Finechem Corporation (Tosoh Corporation)
• Inventors: Haga, Kenichi, Tokudome, Kohichi, Tomiyasu, Shizuo
• Granted Patent: US 8,673,413 B2
• Time in Patent Office: Days
• US Class Current: 118/726
• CPC Class Codes: C23C 16/4481 by evaporation using carrier gas in contact with the source material C23C16/4486 takes precedence
• CPC Class Codes: Y10T 428/13 Hollow or container type article [e.g., tube, vase, etc.]

Abstract

A method for packing a solid organometallic compound into a container for packing the compound is provided, wherein the solid organometallic compound can be stably supplied to a vapor phase epitaxial growth apparatus such as an MOCVD apparatus at a constant concentration for a long period of time. In the method for packing a solid organometallic compound into a container for packing, the compound is composed of grains having a grain size of 8 mm or less and the grains of the compound essentially comprise grains having a grain size of 2.5 to 6 mm.

Claims

1. A method for packing a solid organometallic compound into a container for packing the solid organometallic compound, wherein

a grain size of the solid organometallic compound is 8 mm or less and grains of the solid organometallic compound essentially comprise ones having a grain size of 2.5 to 6 mm.

2. The method for packing a solid organometallic compound according to claim 1, wherein

the solid organometallic compound is packed together with a packing material.

3. The method for packing a solid organometallic compound according to claim 2, wherein

the packing material has a size of 0.8 to 8 mm.

4. The method for packing a solid organometallic compound according to claim 1, wherein:

the container for packing a solid organometallic compound has a carrier gas inlet and a carrier gas outlet and has a structure in which the inside of the container is partitioned into a plurality of vertical spaces so that a carrier gas introduced from the carrier gas inlet flows through each of the vertical spaces and is discharged from the carrier gas outlet.

5. The method for packing a solid organometallic compound according to claim 4, wherein

the container for packing a solid organometallic compound is configured such that:

(a) the inside of the container is partitioned by at least one partition in a vertical direction to form at least two partitioned spaces in the container;

(b) the spaces formed by partitioning the inside of the container by the partition include a space having the carrier gas inlet and a space having the carrier gas outlet; and

(c) the partition inside the container includes a partition having an opening which allows the carrier gas to flow from the carrier gas inlet via each of the spaces inside the container to the carrier gas outlet.

6. The method for packing a solid organometallic compound according to claim 5, wherein

when the opening is placed in a lower portion of the partition, the opening is placed in a position located at one-third or less of an internal height of the container measured from an internal bottom thereof, or when the opening is placed in an upper portion of the partition, the opening is placed in a position located at two-third or more of the internal height of the container measured from the internal bottom thereof.

7. The method for packing a solid organometallic compound according to claim 4, wherein

the container is provided with a packing opening so as to pack the solid organometallic compound into the spaces formed inside the container by partitioning the container by the partition.

8. The method for packing a solid organometallic compound according to claim 1, wherein

the container for packing a solid organometallic compound has a carrier gas inlet and a carrier gas outlet and has a structure in which an inside of the container is partitioned into a plurality of vertical spaces so that a carrier gas introduced from the carrier gas inlet flows through each of the vertical spaces as a downward flow formed by means of carrier gas flow direction inverting means and is discharged from the carrier gas outlet.

9. The method for packing a solid organometallic compound according to claim 8, wherein

the container for packing a solid organometallic compound is configured such that:

(d) the inside of the container is partitioned by at least one partition in a vertical direction to form at least two partitioned spaces in the container;

(e) the spaces formed by partitioning the inside of the container by the partition include a space having the carrier gas inlet and a space having the carrier gas outlet;

(f) the partition inside the container includes a partition having a communication flow passage which has a lower opening and an upper opening each for allowing a carrier gas to flow from the carrier gas inlet via each of the spaces inside the container to the carrier gas outlet;

(g) the communication flow passage is configured such that the carrier gas introduced inside the container is introduced from the lower opening of the communication flow passage and is discharged from the upper opening of the passage; and

(h) the container has a discharging flow passage having a lower opening for discharging the carrier gas from a lower portion of the space having the carrier gas outlet to the carrier gas outlet.

10. The method for packing a solid organometallic compound according to claim 8, wherein:

the lower opening of the communication flow passage is placed in a position located at one-third or less of an internal height of the container measured from an internal bottom thereof;

the upper opening of the communication flow passage is placed in a position located at two-third or more of the internal height of the container measured from the internal bottom thereof; and

the lower opening of the discharging flow passage is placed in a position located at one-third or less of the internal height of the container measured from the internal bottom thereof.

11. The method for packing a solid organometallic compound according to claim 8, wherein

the container is provided with a packing opening so as to pack the solid organometallic compound into the spaces formed inside the container by partitioning the container by the partition.

12. The method for packing a solid organometallic compound according to claim 8, wherein

the container is provided with a packing opening so as to pack the solid organometallic compound into the spaces formed inside the container by partitioning the container by the partition.

13. The method for packing a solid organometallic compound according to claim 1, wherein

the solid organometallic compound is trimethylindium.

14. A solid organometallic compound-packed container in which a solid organometallic compound is packed by means of the packing method according to claim 1.

15. A solid organometallic compound-packed container wherein a grain size of the solid organometallic compound is 8 mm or less and grains of the solid organometallic compound essentially comprise ones having a grain size of 2.5 to 6 mm, and the container has a structure as defined in claim 4.

16. The method for packing a solid organometallic compound according to claim 2, wherein:

the container for packing a solid organometallic compound has a carrier gas inlet and a carrier gas outlet and has a structure in which the inside of the container is partitioned into a plurality of vertical spaces so that a carrier gas introduced from the carrier gas inlet flows through each of the vertical spaces and is discharged from the carrier gas outlet.

17. The method for packing a solid organometallic compound according to claim 3, wherein:

the container for packing a solid organometallic compound has a carrier gas inlet and a carrier gas outlet and has a structure in which the inside of the container is partitioned into a plurality of vertical spaces so that a carrier gas introduced from the carrier gas inlet flows through each of the vertical spaces and is discharged from the carrier gas outlet.

18. The method for packing a solid organometallic compound according to claim 5, wherein

the container is provided with a packing opening so as to pack the solid organometallic compound into the spaces formed inside the container by partitioning the container by the partition.

19. The method for packing a solid organometallic compound according to claim 2, wherein

the container for packing a solid organometallic compound has a carrier gas inlet and a carrier gas outlet and has a structure in which an inside of the container is partitioned into a plurality of vertical spaces so that a carrier gas introduced from the carrier gas inlet flows through each of the vertical spaces as a downward flow formed by means of carrier gas flow direction inverting means and is discharged from the carrier gas outlet.

20. The method for packing a solid organometallic compound according to claim 3, wherein

the container for packing a solid organometallic compound has a carrier gas inlet and a carrier gas outlet and has a structure in which an inside of the container is partitioned into a plurality of vertical spaces so that a carrier gas introduced from the carrier gas inlet flows through each of the vertical spaces as a downward flow formed by means of carrier gas flow direction inverting means and is discharged from the carrier gas outlet.

21. The method for packing a solid organometallic compound according to claim 9, wherein

the container is provided with a packing opening so as to pack the solid organometallic compound into the spaces formed inside the container by partitioning the container by the partition.

22. The method for packing a solid organometallic compound according to claim 10, wherein

the container is provided with a packing opening so as to pack the solid organometallic compound into the spaces formed inside the container by partitioning the container by the partition.

23. The method for packing a solid organometallic compound according to claim 9, wherein

the container is provided with a packing opening so as to pack the solid organometallic compound into the spaces formed inside the container by partitioning the container by the partition.

24. The method for packing a solid organometallic compound according to claim 2, wherein

the solid organometallic compound is trimethylindium.

25. The method for packing a solid organometallic compound according to claim 3, wherein

the solid organometallic compound is trimethylindium.

26. The method for packing a solid organometallic compound according to claim 4, wherein

the solid organometallic compound is trimethylindium.

27. The method for packing a solid organometallic compound according to claim 5, wherein

the solid organometallic compound is trimethylindium.

28. The method for packing a solid organometallic compound according to claim 6, wherein

the solid organometallic compound is trimethylindium.

29. The method for packing a solid organometallic compound according to claim 7, wherein

the solid organometallic compound is trimethylindium.

30. The method for packing a solid organometallic compound according to claim 8, wherein

the solid organometallic compound is trimethylindium.

31. The method for packing a solid organometallic compound according to claim 9, wherein

the solid organometallic compound is trimethylindium.

32. The method for packing a solid organometallic compound according to claim 10, wherein

the solid organometallic compound is trimethylindium.

33. The method for packing a solid organometallic compound according to claim 11, wherein

the solid organometallic compound is trimethylindium.

34. The method for packing a solid organometallic compound according to claim 12, wherein

the solid organometallic compound is trimethylindium.

35. A solid organometallic compound-packed container in which a solid organometallic compound is packed by means of the packing method according to claim 2.

36. A solid organometallic compound-packed container in which a solid organometallic compound is packed by means of the packing method according to claim 3.

37. A solid organometallic compound-packed container wherein a grain size of the solid organometallic compound is 8 mm or less and grains of the solid organometallic compound essentially comprise ones having a grain size of 2.5 to 6 mm, and the container has a structure as defined in claim 5.

38. A solid organometallic compound-packed container wherein a grain size of the solid organometallic compound is 8 mm or less and grains of the solid organometallic compound essentially comprise ones having a grain size of 2.5 to 6 mm, and the container has a structure as defined in claim 6.

39. A solid organometallic compound-packed container wherein a grain size of the solid organometallic compound is 8 mm or less and grains of the solid organometallic compound essentially comprise ones having a grain size of 2.5 to 6 mm, and the container has a structure as defined in claim 7.

40. A solid organometallic compound-packed container wherein a grain size of the solid organometallic compound is 8 mm or less and grains of the solid organometallic compound essentially comprise ones having a grain size of 2.5 to 6 mm, and the container has a structure as defined in claim 8.

41. A solid organometallic compound-packed container wherein a grain size of the solid organometallic compound is 8 mm or less and grains of the solid organometallic compound essentially comprise ones having a grain size of 2.5 to 6 mm, and the container has a structure as defined in claim 9.

42. A solid organometallic compound-packed container wherein a grain size of the solid organometallic compound is 8 mm or less and grains of the solid organometallic compound essentially comprise ones having a grain size of 2.5 to 6 mm, and the container has a structure as defined in claim 10.

43. A solid organometallic compound-packed container wherein a grain size of the solid organometallic compound is 8 mm or less and grains of the solid organometallic compound essentially comprise ones having a grain size of 2.5 to 6 mm, and the container has a structure as defined in claim 11.

44. A solid organometallic compound-packed container wherein a grain size of the solid organometallic compound is 8 mm or less and grains of the solid organometallic compound essentially comprise ones having a grain size of 2.5 to 6 mm, and the container has a structure as defined in claim 12.