Method and device for modulating light with multiple electrodes
3 Assignments
0 Petitions
Accused Products
Abstract
Improvements in an interferometric modulator that has a cavity defined by two walls.
191 Citations
53 Claims
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1-10. -10. (canceled)
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11. An electronic device, the device comprising:
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a cavity at least partially defined by first and second layers, the cavity being configured to cause the electronic device to reflect a wavelength of light; and
first and second electrodes coupled to the first layer and associated with the cavity, wherein at least one of the first and second electrodes is configured to cause a relative movement of the first and second layers. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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23. A display device, comprising:
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means for causing the display device to reflect a wavelength of light, the causing means at least partially defined at least two means for reflecting light; and
first and second means for moving at least one of the at least two reflecting means, wherein the first and second moving means are coupled to one of the at least two reflecting means, and at least one of the first and second moving means is configured to cause a relative movement of the at least two reflecting means. - View Dependent Claims (24, 25, 26, 27, 28, 29, 30, 31, 32)
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33. An interferometer device, comprising:
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first and second layers comprising first and second at least partially reflective surfaces, respectively, the first and second layers being movable with respect to one another, the first and second partially reflective surfaces being spaced apart by a cavity having a variable dimension, the cavity configured to cause the interferometric device to reflect a wavelength of light; and
first and second electrodes coupled to the first partially reflective surface, wherein at least one of the first and second electrodes is configured to cause a relative movement of the first and second layers. - View Dependent Claims (34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 47, 48, 49, 50, 51, 52, 53)
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46. A method of making a MEMS device, the method comprising:
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providing a substrate;
forming a first layer on the substrate;
coupling first and second electrodes to the first layer;
forming a sacrificial layer on the first layer;
forming a second layer on the sacrificial layer; and
forming a cavity between the first and second layers by removing the sacrificial layer, wherein the cavity has a variable dimension, and is configured to cause the MEMS device to reflect a wavelength of light, and the first layer is configured to move relative to the second layer.
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Specification