Thin film-forming material and method for producing thin film
First Claim
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1. A thin film-forming material comprising a bis(β
- -diketonato)zinc compound that is liquid at 25°
C.
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Abstract
The thin film-forming material of the present invention comprises a bis(β-diketonato)zinc compound that is liquid at 25° C. and is suitable for forming a zinc-containing thin film. By using the thin film-forming material, a thin film can be produced with stable film-forming rate or stable film composition control without suffering from problems of raw material gas suppliability and in-line raw material transport. Preferred (β-diketonato)zinc compounds include, for example, bis(octane-2,4-dionato)zinc and bis(2,2-dimethyl-6-ethyldecane-3,5-dionato)zinc.
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10 Claims
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1. A thin film-forming material comprising a bis(β
- -diketonato)zinc compound that is liquid at 25°
C. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
- -diketonato)zinc compound that is liquid at 25°
Specification