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Thin film-forming material and method for producing thin film

  • US 20070178235A1
  • Filed: 05/31/2005
  • Published: 08/02/2007
  • Est. Priority Date: 06/14/2004
  • Status: Active Grant
First Claim
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1. A thin film-forming material comprising a bis(β

  • -diketonato)zinc compound that is liquid at 25°

    C.

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