Method of manufacturing semiconductor device and cleaning apparatus
First Claim
1. A manufacturing method of a semiconductor device comprising:
- dry-etching a semiconductor substrate or a structure formed on the semiconductor substrate;
supplying a solution onto the semiconductor substrate;
measuring a specific resistance or a conductivity of the supplied solution; and
supplying a removal solution for removing the etching residual material onto the semiconductor substrate for a predetermined period of time based on the specific resistance or the conductivity of the solution, when an etching residual material adhering to the semiconductor substrate or the structure is removed.
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Accused Products
Abstract
The disclosure concerns a manufacturing method of a semiconductor device includes dry-etching a semiconductor substrate or a structure formed on the semiconductor substrate; supplying a solution onto the semiconductor substrate; measuring a specific resistance or a conductivity of the supplied solution; and supplying a removal solution for removing the etching residual material onto the semiconductor substrate for a predetermined period of time based on the specific resistance or the conductivity of the solution, when an etching residual material adhering to the semiconductor substrate or the structure is removed.
11 Citations
16 Claims
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1. A manufacturing method of a semiconductor device comprising:
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dry-etching a semiconductor substrate or a structure formed on the semiconductor substrate; supplying a solution onto the semiconductor substrate; measuring a specific resistance or a conductivity of the supplied solution; and supplying a removal solution for removing the etching residual material onto the semiconductor substrate for a predetermined period of time based on the specific resistance or the conductivity of the solution, when an etching residual material adhering to the semiconductor substrate or the structure is removed. - View Dependent Claims (2, 3, 4)
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5. A manufacturing method of a semiconductor device comprising:
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dry-etching a semiconductor substrate or a structure formed on the semiconductor substrate; supplying a solution from a nozzle onto the semiconductor substrate while scanning the semiconductor substrate from the end portion to the central portion thereof and while rotating the semiconductor substrate; periodically or continuously measuring a specific resistance or a conductivity of the supplied solution ; and supplying a removal solution for removing the etching residual material onto the semiconductor substrate while keeping the semiconductor substrate at a predetermined temperature on the basis of the specific resistance or the conductivity of the solution, when an etching residual material adhering to the semiconductor substrate or the structure is removed. - View Dependent Claims (6)
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7. A manufacturing method of a semiconductor device comprising:
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dry-etching a semiconductor substrate or a structure formed on the semiconductor substrate; supplying a solution onto the semiconductor substrate; measuring a specific resistance or a conductivity of the supplied solution ; and determining a paddle time for accumulating a removal solution on a surface of the semiconductor substrate on the basis of the specific resistance or the conductivity of the supplied solution, the removal solution removing a etching residual material adhering to the semiconductor substrate or the structure during the dry-etching; determining a relative temperature between the semiconductor substrate and the removal solution on the basis of a coarseness/denseness of surface patterns of the semiconductor substrate; and supplying the removal solution, which has-a temperature different from the semiconductor substrate by the relative temperature, on the semiconductor substrate, and accumulating the removal solution on the semiconductor substrate for the paddle time, when the etching residual material is removed. - View Dependent Claims (8)
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9. A manufacturing method of a semiconductor device comprising:
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dry-etching a semiconductor substrate or a structure formed on the semiconductor substrate; supplying a solution, which has an oxidation-reduction potential is 0.5 V or less, on the semiconductor substrate or the structure, to which an etching residual material adheres; removing the etching residual material by supplying the removal solution onto the semiconductor substrate or the structure. - View Dependent Claims (10, 11)
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12. A cleaning apparatus comprising:
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a stage rotating a semiconductor substrate to which an etching residual material adheres, the stage controlling a temperature of the semiconductor substrate; a first nozzle which discharges a solution onto a surface of the semiconductor substrate; a measuring unit which measures a specific resistance or a conductivity of the solution discharged onto the semiconductor substrate; a processing unit which determines time for supplying the removal solution onto the semiconductor substrate on the basis of the specific resistance or the conductivity of the solution; and a second nozzle which discharges a removal solution for removing the etching residual material depending on the time determined by the processing unit. - View Dependent Claims (13, 14, 15, 16)
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Specification