Method and apparatus for comparing semiconductor-related technical systems characterized by statistical data

• US 20070180411A1
• Filed: 01/27/2006
• Published: 08/02/2007
• Est. Priority Date: 01/27/2006
• Status: Abandoned Application

• Current Assignee: Infineon Technologies AG
• Original Assignee: Infineon Technologies AG
• Inventors: Swegat, Wolfgang, Gupta, Ankur, Jain, Sheetal
• Application Number:
  US11/341,900
• Publication Number:
  US 20070180411A1
• Time in Patent Office: Days
• US Class Current: 716/136
• CPC Class Codes: G01R 31/2894 Aspects of quality control [QC] G01R31/31718 takes precedence; program control for QC G05B19/41875
• CPC Class Codes: G06F 11/261 by simulating additional hardware, e.g. fault simulation
• CPC Class Codes: H01L 21/67253 Process monitoring, e.g. flow or thickness monitoring

Abstract

A method and an apparatus are provided for comparing a first semiconductor-related technical system with a second semiconductor-related technical system using statistical means. First statistical data characterizing the first technical system and second statistical data characterizing the second technical system are provided. A statistical test comparing the first statistical data with the second statistical data is performed after the first and second statistical data has been provided. Whether the first and second technical system are equivalent is then determined depending on the result of the statistical test.

Claims

1. A method for comparing a first semiconductor-related technical system with a second semiconductor-related technical system, the method comprising:

providing first statistical data characterizing the first technical system,

providing second statistical data characterizing the second technical system,

performing a statistical test comparing the first statistical data with the second statistical data, and

determining whether the first and second technical system are equivalent depending on the result of the statistical test.

2. The method according to claim 1, wherein the statistical test comprises a test taking shapes of distributions of the first and second statistical data into account.

3. The method according to claim 1, wherein providing the first and second statistical data comprises at least one of:

performing a simulation for obtaining at least one of the first or second statistical data, or

measuring at least one of the first or second statistical data.

4. The method according to claim 1, further comprising evaluating whether the first and second statistical data have a normal distribution.

5. The method according to claim 4, further comprising selecting the statistical test depending on the result of the evaluation.

6. The method according to claim 5, wherein the checking comprises computing an autocorrelation function of the first and second statistical data .

7. The method according to claim 5, further comprising terminating the method if at least one of the first or second statistical data are not random data.

8. The method according to claim 5, wherein the first and second statistical data each comprise a plurality of data subsets related to different parameters of the first and second technical systems, respectively.

9. The method according to claim 5, wherein the first and second technical system are chosen from the group consisting of a semiconductor fabrication line and a semiconductor device simulating program and, if the first and second technical systems each comprise semiconductor device simulation programs, the first technical system includes a first statistical model of a semiconductor component and the second technical system comprises a second statistical model of a semiconductor component, and the first and second statistical models are designed to be equivalent.

10. An apparatus for comparing a first semiconductor-related technical system with a second semiconductor-related technical system, the apparatus comprising:

a data provider to provide first statistical data characterizing the first technical system and second statistical data characterizing the second technical system,

a calculator to perform a statistical test to compare the first statistical data with the second statistical data, and

a determiner to determine whether the first and second technical systems are equivalent depending on an output of the calculator.

11. The apparatus according to claim 10, wherein the data provider comprises at least one of:

a measurer to measure at least one of the first or second statistical data, or

a simulation engine to perform a simulation to obtain at least one of the first or second statistical data.

12. The apparatus according to claim 10, wherein the statistical test comprises a test that takes shapes of distributions of the first and second statistical data into account.

13. The apparatus according to claim 10, further comprising an evaluator to evaluate whether the first and second statistical data have a normal distribution

14. The apparatus according to claim 13, further comprising a selector to select the statistical test depending on an output of the evaluator.

15. An apparatus for comparing a first semiconductor-related technical system with a second semiconductor-related technical system, the apparatus comprising:

a data provider to provide first statistical data characterizing the first technical system and second statistical data characterizing the second technical system,

a calculator to perform a statistical test to compare the first statistical data with the second statistical data,

a determiner to determine whether the first and second technical systems are equivalent depending on an output of the calculator, and

a checker to check whether the first and second statistical data are random data.

16. The apparatus according to claim 15, wherein the checker comprises an autocorrelator to compute an autocorrelation function of the first and second statistical data.

17. The apparatus according to claim 15, further comprising a termination device to terminate processing of the first and second statistical data if at least one of the first or second statistical data are not random data.

18. The apparatus according to claim 15, wherein the first and second statistical data each comprise a plurality of data subsets related to different parameters of the first and second technical system, respectively.

19. The apparatus according to claim 15, wherein the first and second technical system are chosen from the group consisting of a semiconductor fabrication line and a semiconductor device simulating program and, if the first and second technical systems each comprise semiconductor device simulation programs, the first technical system includes a first statistical model of a semiconductor component and the second technical system comprises a second statistical model of a semiconductor component, and the first and second statistical models are designed to be equivalent.

20. An apparatus for comparing a first semiconductor-related technical system with a second semiconductor-related technical system, the apparatus comprising:

a data providing means for providing first statistical data characterizing the first technical system and second statistical data characterizing the second technical system,

calculation means for performing at least one statistical test for comparing the first statistical data with the second statistical data,

determination means for determining whether the first technical system and the second technical system are equivalent depending on the output of the calculation means.

21. The apparatus according to claim 20, wherein the data providing means comprise at least one of:

measuring means for measuring at least one of the first or second statistical data, or

simulation means for performing a simulation for obtaining at least one of the first or second statistical data.

22. The apparatus according to claim 20, further comprising checking means for checking whether the first and second statistical data are random data.

23. The apparatus according to claim 22, wherein the checking means comprise calculation means designed for computing the autocorrelation function of the first statistical data and the second statistical data.

24. The apparatus according to claim 20, further comprising evaluation means for evaluating whether the first and second statistical data have a normal distribution.