Micromechanical motion sensor
1 Assignment
0 Petitions
Accused Products
Abstract
A micromechanical motion sensor is capable of detecting a deflection imparted to an oscillatably mounted bar spring element excited to a permanent periodic oscillation by an electrostatic oscillating drive to which a periodic drive voltage is applied. To compensate non-linearities of the resonance frequency response of the bar spring element, a sum of a normal drive voltage signal and a compensation drive signal may be applied to a comb drive. In an alternative embodiment, separate compensation comb drive units may be additionally provided to the comb drive units used for the oscillation drive and a compensation voltage signal may be applied to them to compensate for the non-linearity.
10 Citations
32 Claims
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1-16. -16. (canceled)
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17. A micromechanical motion sensor, comprising:
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an electrostatic oscillating drive;
an oscillatably mounted bar spring element capable of being excited to a permanent periodic oscillation by the electrostatic oscillating drive to which a periodic drive voltage is applied;
an electrostatic compensation drive arrangement acting upon the bar spring element, wherein;
an appropriate periodic compensation voltage is applied to the electrostatic compensation drive arrangement to compensate for a non-linearity of a resonance frequency response of the bar spring element; and
an arrangement for detecting a deflection imparted to the bar spring element. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32)
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Specification