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Capacitive micromachined ultrasound transducer and methods of making the same

  • US 20070180916A1
  • Filed: 02/09/2006
  • Published: 08/09/2007
  • Est. Priority Date: 02/09/2006
  • Status: Abandoned Application
First Claim
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1. A method of making a capacitive micromachined ultrasound transducer cell, comprising:

  • providing a carrier substrate, wherein the carrier substrate comprises glass;

    providing a membrane such that at least one of the carrier substrate, or the membrane comprises support posts, wherein the support posts are configured to define a cavity depth; and

    bonding the membrane to the carrier substrate by using the support posts, wherein the carrier substrate, the membrane and the support posts define an acoustic cavity.

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