Capacitive micromachined ultrasound transducer and methods of making the same
First Claim
1. A method of making a capacitive micromachined ultrasound transducer cell, comprising:
- providing a carrier substrate, wherein the carrier substrate comprises glass;
providing a membrane such that at least one of the carrier substrate, or the membrane comprises support posts, wherein the support posts are configured to define a cavity depth; and
bonding the membrane to the carrier substrate by using the support posts, wherein the carrier substrate, the membrane and the support posts define an acoustic cavity.
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Abstract
A method of making a capacitive micromachined ultrasound transducer cell is provided. The method includes providing a carrier substrate, where the carrier substrate comprises glass. The step of providing the glass substrate may include forming vias in the glass substrate. Further, the method includes providing a membrane such that at least one of the carrier substrate, or the membrane comprises support posts, where the support posts are configured to define a cavity depth. The method further includes bonding the membrane to the carrier substrate by using the support posts, where the carrier substrate, the membrane and the support posts define an acoustic cavity.
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Citations
32 Claims
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1. A method of making a capacitive micromachined ultrasound transducer cell, comprising:
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providing a carrier substrate, wherein the carrier substrate comprises glass;
providing a membrane such that at least one of the carrier substrate, or the membrane comprises support posts, wherein the support posts are configured to define a cavity depth; and
bonding the membrane to the carrier substrate by using the support posts, wherein the carrier substrate, the membrane and the support posts define an acoustic cavity. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A method of making a capacitive micromachined ultrasound transducer cell, comprising:
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providing a carrier substrate having a first surface and a second surface, wherein the carrier substrate comprises glass;
forming a via in the carrier substrate, wherein the via extends from the first surface to the second surface of the carrier substrate; and
coupling a membrane to the carrier substrate to define an acoustic cavity, wherein a depth of the acoustic cavity is defined by support posts, and wherein one of the carrier substrate, or the membrane comprises the support posts.
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18. A method of making a capacitive micromachined ultrasound transducer array, comprising
providing a glass substrate having a first surface and a second surface, wherein the first surface is partitioned into a plurality of portions; -
forming vias in the glass substrate, wherein the vias extend from the first surface of the glass substrate to the second surface of the glass substrate;
depositing bottom electrodes on each of the portions of the first surface of the glass substrate;
coupling a plurality of membranes to the glass substrate such that each membrane is coupled to a portion of the glass substrate to define an acoustic cavity, and wherein a depth of the acoustic cavity is defined by support posts disposed within one of the glass substrate, or the membrane; and
depositing contact pads on the first surface of the glass substrate such that the contact pads are formed on the portions of the glass substrate which does not employ the acoustic cavity, and wherein each contact pad is in electrical communication with a corresponding via. - View Dependent Claims (19, 20, 21, 22, 23, 24)
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25. A capacitive micromachined ultrasound transducer cell, comprising;
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a glass substrate having a first surface and a second surface; and
a membrane bonded to the first surface of the glass substrate, wherein one of the first surface of the glass substrate or the membrane defines a cavity. - View Dependent Claims (26, 27, 28, 29)
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30. A system, comprising:
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a transducer array comprising a plurality of capacitive micromachined ultrasound transducer cells, each cell comprising;
a glass substrate having a first surface and a second surface;
a membrane bonded to the first surface of the glass substrate, wherein one of the first surface of the glass substrate or the membrane comprises support posts, and wherein the glass substrate, the membrane and the support posts define a cavity;
an electrically insulating layer disposed in the cavity and coupled to the first surface of the glass electrode; and
a bottom electrode disposed in the cavity. - View Dependent Claims (31, 32)
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Specification