Method and apparatus for accurate calibration of VUV reflectometer
First Claim
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1. A method of calibrating a system that obtains reflectance data, comprising:
- collecting reflectance data from a standard sample, wherein exact properties of the standard sample vary from assumed properties of the standard sample; and
utilizing, in the wavelength region for which calibration is desired, the presence of reflectance variations from the standard sample that result from variations between actual and assumed properties of the standard sample to assist in calibrating the system.
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Abstract
A calibration technique is provided that utilizes a standard sample that allows for calibration in the wavelengths of interest even when the standard sample may exhibit significant reflectance variations at those wavelengths for subtle variations in the properties of the standard sample. A second sample, a reference sample may have a relatively featureless reflectance spectrum over the same spectral region and is used in combination with the calibration sample to achieve the calibration. In one embodiment the spectral region may include the VUV spectral region.
105 Citations
53 Claims
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1. A method of calibrating a system that obtains reflectance data, comprising:
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collecting reflectance data from a standard sample, wherein exact properties of the standard sample vary from assumed properties of the standard sample; and
utilizing, in the wavelength region for which calibration is desired, the presence of reflectance variations from the standard sample that result from variations between actual and assumed properties of the standard sample to assist in calibrating the system. - View Dependent Claims (2, 3, 4, 5, 6, 7, 39, 40)
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8. A method of calibrating a reflectometer, comprising:
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assuming the presence of a calibration error function in a standard sample; and
calibrating the reflectometer by utilizing the calibration error function of the standard sample. - View Dependent Claims (9, 10, 11, 12, 13, 14, 41, 42, 43, 44, 45, 46, 47, 48)
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15. A method for providing a calibration routine for calibrating a reflectometer, comprising:
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configuring the calibration routine to utilize a standard sample calibration being desired in at least a portion of a first wavelength region;
configuring the calibration routine to utilize a first set of reflectance data from the standard sample and to provide a first calibration of the reflectometer based at least in part upon the first set of reflectance data;
configuring the calibration routine to utilize a reference sample that spectrally has less features in at least the first wavelength region, than the standard sample;
configuring the calibration routine to utilize a second set of reflectance data from the reference sample; and
configuring the calibration routine to utilize the first and second set of reflectance data to further calibrate the reflectometer. - View Dependent Claims (16, 17, 18, 19, 20, 49, 50, 51)
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21. A method of calibrating a reflectometer, comprising:
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collecting a first set of reflectance data from a standard sample that has a calibration error function in a first wavelength region in which calibration is desired;
collecting a second set of reflectance data from a reference sample that has less spectral features as compared to the standard sample in the first wavelength region; and
utilizing the first and second sets of reflectance data to calibrate the reflectometer. - View Dependent Claims (22, 23, 24, 25, 26, 52, 53)
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27-38. -38. (canceled)
Specification