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Method and apparatus for accurate calibration of a reflectometer by using a relative reflectance measurement

  • US 20070181794A1
  • Filed: 05/05/2006
  • Published: 08/09/2007
  • Est. Priority Date: 08/11/2004
  • Status: Active Grant
First Claim
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1. A method of calibrating a system that obtains reflectance data, comprising:

  • obtaining reflectance data from a first calibration sample;

    obtaining reflectance data from a second calibration sample, wherein exact properties of the at least one of the first and second calibration samples may vary from assumed properties of the calibration samples and wherein the reflective properties of the first and second calibration samples differ; and

    utilizing a ratio based upon the data obtained from the first calibration sample and the data obtained from the second calibration sample in order to assist in calibrating the system.

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