Method and apparatus for performing highly accurate thin film measurements
First Claim
1. A method of measuring a value of a first property of a sample with a reflectometer, comprising:
- measuring a reflectance spectrum of the sample, the sample having at least one unknown actual value of an unknown property;
providing an expected reflectance spectrum of the sample utilizing at least one initial assumption regarding the at least one unknown actual value of the unknown property; and
utilizing a ratio between the expected reflectance spectrum and the measured reflectance spectrum to provide an actual value of the first property.
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Accused Products
Abstract
A reflectometer data reduction technique is provided that utilizes a ratio of an expected reflectance spectrum of the sample being measured to the actual reflectance spectrum of the sample being measured. The technique is particularly useful in spectral regions that contain sharp spectral features, for example such as the sharp features that thin films often exhibited in the VUV region. In this manner sharp spectral features, for example resulting from either interference or absorption effects are advantageously utilized to better determine a data minimum that is indicative of an actual measurement value. The derivative of this ratio may be utilized to accentuate sharp spectral features. The data reduction techniques may further utilize a two step approach first using a low resolution difference based technique and then a high resolution technique based on reflectance ratios in the region of interest initially identified by the low resolution technique.
86 Citations
39 Claims
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1. A method of measuring a value of a first property of a sample with a reflectometer, comprising:
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measuring a reflectance spectrum of the sample, the sample having at least one unknown actual value of an unknown property;
providing an expected reflectance spectrum of the sample utilizing at least one initial assumption regarding the at least one unknown actual value of the unknown property; and
utilizing a ratio between the expected reflectance spectrum and the measured reflectance spectrum to provide an actual value of the first property. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A method for providing data convergence for a reflectometer measurement, comprising:
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providing a sample having at least one unknown property;
measuring a reflectance spectrum of the sample, the measurement including a wavelength region in which a sharp spectral feature of the sample is exhibited; and
advantageously utilizing data resulting from the sharp spectral feature exhibited by the sample to determine an actual value of the at least one unknown property. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19)
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20. A method of measuring at least one property of a thin film material utilizing a reflectance measurement from a sample, comprising:
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utilizing an amplitude based fitting routine to provide a low resolution measurement of an actual value of the property; and
utilizing a spectrally driven based fitting routine to provide a high resolution measurement of the actual value of the property. - View Dependent Claims (21, 22, 23, 24)
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25. A method of measuring an unknown value of a property of a sample with a reflectometer, comprising:
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measuring a reflectance spectrum of the sample, at least a portion of the reflectance spectrum including wavelengths below the deep ultraviolet (DUV) region;
providing an expected reflectance spectrum of the sample utilizing at least one initial assumption regarding the unknown value of the property of the sample; and
calculating a ratio between the expected reflectance spectrum and the measured reflectance spectrum;
utilizing a derivative of the ratio between the expected reflectance spectrum and the measured reflectance spectrum;
iteratively adjusting the at least one initial assumption and the expected reflectance spectrum to recalculate the ratio between the expected reflectance spectrum and the measured reflectance spectrum to provide an actual value of the first property. - View Dependent Claims (26, 27, 28, 29, 30, 31)
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32. A reflection measurement apparatus which operates below deep ultra-violet (DUV) wavelengths, the apparatus comprising:
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at least one light source, the at least one light source providing a source beam including at least wavelengths below DUV wavelengths;
a spectrometer that receives light, including at least wavelengths below DUV wavelengths, reflected from a sample; and
a data fitting routine coupled to the apparatus in hardware or software, the data fitting routine comprising;
measuring a reflectance spectrum of the sample, the sample having at least one unknown actual value of an unknown property;
providing an expected reflectance spectrum of the sample utilizing at least one initial assumption regarding the at least one unknown actual value of the unknown property; and
utilizing a ratio between the expected reflectance spectrum and the measured reflectance spectrum to provide an actual value of the first property. - View Dependent Claims (33, 34, 35, 36, 37, 38, 39)
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Specification