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Method utilizing intensity interpolation for measuring edge locations in a high precision machine vision inspection system

  • US 20070183666A1
  • Filed: 02/08/2006
  • Published: 08/09/2007
  • Est. Priority Date: 02/08/2006
  • Status: Active Grant
First Claim
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1. A method for determining the location of an edge feature in an inspection image of a workpiece acquired by a machine vision inspection system, the method comprising:

  • a) identifying an edge feature included in the image;

    b) defining a scan line orientation to be used for determining the location of at least one edge point of the edge feature;

    c) determining a plurality of estimated image intensity values corresponding to positions along a straight line that is aligned with the defined scan line orientation; and

    d) determining the location of the edge point along the straight line based on the plurality of estimated image intensity values and their corresponding positions along the straight line.

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