Solid-state imaging device and camera

• US 20070188635A1
• Filed: 12/05/2006
• Published: 08/16/2007
• Est. Priority Date: 02/15/2006
• Status: Abandoned Application

• Current Assignee: Panasonic Corporation (Panasonic Holdings Corporation)
• Original Assignee: Panasonic Corporation (Panasonic Holdings Corporation)
• Inventors: Yamaguchi, Takumi, Ueda, Daisuke, Inaba, Yuichi
• Application Number:
  US11/633,583
• Publication Number:
  US 20070188635A1
• Time in Patent Office: Days
• US Class Current: 348/272
• CPC Class Codes: H01L 27/14621 Colour filter arrangements
• CPC Class Codes: H01L 27/14623 Optical shielding
• CPC Class Codes: H01L 27/14627 Microlenses
• CPC Class Codes: H01L 27/14643 Photodiode arrays; MOS imagers

Abstract

A solid-state imaging device 101 is composed of a transparent film 204, a color filter 205, a planarizing film 207, and a plurality of microlenses 208 that are sequentially formed on a semiconductor substrate 201. A photodiode 202 is formed in a surface of the semiconductor substrate 201 that is closer to the transparent film 204. A light shielding film 203 is formed in a surface of the transparent film 204 that is closer to the semiconductor substrate 201. Color filters 205 respectively corresponding to two adjacent pixels are partitioned by a light shielding wall 206. The light shielding wall 206 is a λ/4 multilayer film that reflects visible light.

Claims

1. A solid-state imaging device that includes two-dimensionally arrayed pixels and images in color, the solid-state imaging device comprising:

a plurality of color filters each operable to transmit light of a wavelength predetermined for each pixel; and

a light shielding wall operable to partition the color filters for each pixel, wherein

the light shielding wall includes a multilayer film and reflects visible light, the multilayer film being composed of alternately laminated two types of dielectric layers each having a different refractive index and a same optical thickness.

2. The solid-state imaging device of claim 1, wherein

each of the color filters is a multilayer interference filter.

3. The solid-state imaging device of claim 2, wherein

the light shielding wall and at least one of the color filters have a same number of layers.

4. The solid-state imaging device of claim 2, wherein

the light shielding wall and the color filters are made from a same dielectric material.

5. The solid-state imaging device of claim 4, wherein

the multilayer interference filters that constitute the color filters are composed of two λ

/4 multilayer films with a spacer layer sandwiched therebetween, and

each dielectric layer that constitutes the light shielding wall and each dielectric layer of the λ

/4 multilayer films that constitute the color filters have a same optical thickness.

6. The solid-state imaging device of claim 1, wherein

the light shielding wall is a multilayer interference filter composed of two λ

/4 multilayer films with a spacer layer sandwiched therebetween.

7. The solid-state imaging device of claim 1, wherein

a multilayer interference filter that constitutes each color filter is composed of two λ

/4 multilayer films with a spacer layer sandwiched therebetween, and

a film thickness of the spacer layer differs according to a color of light transmitted by the color filter.

8. The solid-state imaging device of claim 7, wherein

the light shielding wall is composed of two λ

/4 multilayer films with a spacer layer sandwiched therebetween, and

the spacer layer of the color filter has an optical thickness different from an optical thickness of the spacer layer of the light shielding wall.

9. A camera having a solid-state imaging device, the solid-state imaging device comprising:

two-dimensionally arrayed pixels;

a plurality of color filters each operable to transmit light of a wavelength predetermined for each pixel; and

a light shielding wall operable to partition the color filters for each pixel, wherein

the light shielding wall includes a multilayer film and reflects visible light, the multilayer film being composed of alternately laminated two types of dielectric layers each having a different refractive index and a same optical thickness.