Stage apparatus and exposure apparatus
First Claim
1. A stage apparatus comprising:
- a movable stage that moves along a plane of motion; and
a position-detection apparatus that detects a position of the movable stage with a beam, the stage apparatus further comprising;
a driving apparatus that drives the movable stage;
a follow-up optical member that is provided at the driving apparatus and causes the beam to follow the movable stage as the movable stage moves; and
a first optical member that is provided on the movable stage and is optically coupled with the follow-up optical member.
1 Assignment
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Accused Products
Abstract
The position of a movable stage is detected without increasing cost or the size of apparatus. An apparatus comprises movable stages (WST, MST) that move along a plane of motion (12a); and a position-detection apparatus that detects the positions of the movable stages (WST, MST) with beams (B1 to B3). The apparatus further comprises driving apparatuses (82, 84) that drives the movable stages (WST, MST); follow-up optical members (30 to 33) which are provided on the driving apparatuses (81, 84) and cause the beams (B1 to B3) to follow the movable stages (WST, MST) as the movable stages (WST, MST) move; and first optical members (34 to 39) which are provided on the movable stages (WST, MST) and are optically coupled with the follow-up optical members (30 to 33).
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Citations
29 Claims
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1. A stage apparatus comprising:
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a movable stage that moves along a plane of motion; and
a position-detection apparatus that detects a position of the movable stage with a beam, the stage apparatus further comprising;
a driving apparatus that drives the movable stage;
a follow-up optical member that is provided at the driving apparatus and causes the beam to follow the movable stage as the movable stage moves; and
a first optical member that is provided on the movable stage and is optically coupled with the follow-up optical member. - View Dependent Claims (2, 3, 9, 10, 11, 12, 21, 22)
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4. A stage apparatus comprising:
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a movable stage that moves along a plane of motion; and
a position-detection apparatus that detects a position of the movable stage, the stage apparatus further comprising;
a first optical member that is provided on the movable stage;
a second optical member that changes the direction of a beam from a light source towards the first optical member; and
a follow-up apparatus that causes the second optical member to follow a movement of the movable stage. - View Dependent Claims (5, 6)
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7. A stage apparatus comprising:
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a movable stage that moves along a plane of motion; and
a position-detection apparatus that detects a position of the movable stage, the stage apparatus further comprising;
a first optical member that is provided on the movable stage and changes the direction of an incident beam towards a direction intersecting the plane of motion; and
a second optical member that is provided on the movable stage and changes the direction of the beam from the first optical member towards a direction intersecting the plane of motion. - View Dependent Claims (8)
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13. A stage apparatus comprising:
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a movable stage that moves along a plane of motion; and
a position-detection apparatus that detects a position of the movable stage with a beam, the stage apparatus further comprising;
optical separation members that are provided on the movable stage, each of the optical dividing members divides the beam into a first measuring beam along the plane of motion and a second measuring beam intersecting the plane of motion; and
a reflecting member that has a first reflecting surface and a second reflecting surface, the first reflecting surface reflecting the first measuring beam towards the optical separation members, the second reflecting surface reflecting the second measuring beam towards the optical separation members. - View Dependent Claims (14)
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15. A stage apparatus comprising:
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a first movable stage that moves along a plane of motion;
a second movable stage that moves along the plane of motion; and
a position-detection apparatus that detects positions of the first movable stage and the second movable stage with a beam, the stage apparatus further comprising;
an optical separation system that divides the beam into a first beam and a second beam such that height positions in a direction orthogonal to the plane of motion are the same;
a first optical system that is provided at the first movable stage, changes the height position of the first beam having been incident, and emits the first beam; and
a second optical system that is provided at the second movable stage, changes the height position of the second beam having been incident, and emits the second beam. - View Dependent Claims (16, 20)
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17. A stage apparatus comprising:
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a first movable stage that moves along a plane of motion;
a second movable stage that moves along the plane of motion; and
a position-detection apparatus that detects positions of the first movable stage and the second movable stage, the stage apparatus further comprising;
a first optical system that is provided on the first movable stage;
a second optical system that is provided on the second movable stage; and
a reflecting member that reflects a first beam from the first optical system and a second beam from the second optical system. - View Dependent Claims (18, 19)
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23. An exposure apparatus for exposing a pattern onto a substrate via liquid supplied to the substrate, the exposure apparatus comprising:
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a first substrate table that has a support surface, the support surface supporting the substrate;
a first stage main body that is provided below the first substrate table and has at least one side surface positioned towards an inner side from a side surface of the first substrate table;
a first optical member that is provided on the at least one side surface of the first stage main body and that upon which a beam is incident and from which the beam is emitted in a direction intersecting the support surface; and
a first position-detection apparatus that detects a position of the substrate in the direction intersecting the support surface in conjunction with the first optical member. - View Dependent Claims (24, 25, 26, 27, 28, 29)
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Specification