High order silane composition, and method of forming silicon film using the composition
First Claim
1. A method of forming a silicon film over a substrate comprising:
- irradiating a first liquid material with a light to form a second liquid material, the first liquid material including a silane compound that is represented by the general formula SinX2n, each X independently representing a hydrogen atom or a halogen atom, and n being an integer greater than or equal to 3, the second liquid material including a first polysilane component and a second polysilane component, a molecular weight of the first polysilane component being larger than a molecular weight of the second polysilane component; and
applying the second liquid material to the substrate.
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Abstract
It is an object of the present invention to provide a high order silane composition that contains a polysilane having a higher molecular weight than conventionally, this being from the viewpoints of wettability when applying onto a substrate, boiling point and safety, and hence in particular enables a high-quality silicon film to be formed easily, and also a method of forming an excellent silicon film using the composition. The present invention attains this object by providing a high order silane composition containing a polysilane obtained through photopolymerization by irradiating a solution of a photopolymerizable silane or a photopolymerizable like-liquid silane with ultraviolet light. Moreover, the present invention provides a method of forming a silicon film comprising the step of applying such a high order silane composition onto a substrate.
41 Citations
10 Claims
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1. A method of forming a silicon film over a substrate comprising:
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irradiating a first liquid material with a light to form a second liquid material, the first liquid material including a silane compound that is represented by the general formula SinX2n, each X independently representing a hydrogen atom or a halogen atom, and n being an integer greater than or equal to 3, the second liquid material including a first polysilane component and a second polysilane component, a molecular weight of the first polysilane component being larger than a molecular weight of the second polysilane component; and
applying the second liquid material to the substrate. - View Dependent Claims (4, 5, 6, 7, 8, 9, 10)
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2. A method of forming a silicon film over a substrate comprising:
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irradiating a first liquid material with a light to form a second liquid material, the first liquid material including a silane compound that is represented by the general formula SinX2n, each X independently representing a hydrogen atom or a halogen atom, and n being an integer greater than or equal to 3, the second liquid material including a first polysilane component and a second polysilane component, a molecular weight of the first polysilane component being larger than a molecular weight of the second polysilane component such that the first polysilance component is a precipitate in the second liquid material;
removing the precipitate from the second liquid material by filtering to form a third liquid material, a viscosity of the third liquid material being within the range of 1 to 100 m Pa s; and
applying the third liquid material to the substrate.
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3. A method of forming a silicon film over a substrate comprising:
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irradiating a first liquid material with a light to form a second liquid material, the first liquid material including a silane compound that is represented by the general formula SinX2n, each X independently representing a hydrogen atom or a halogen atom, and n being an integer greater than or equal to 3, the first liquid material including a substance that has at least one of the group 3B elements of the periodic table and the group 5B elements of the periodic table, the second liquid material including a first polysilane component and a second polysilane component, a molecular weight of the first polysilane component being larger than a molecular weight of the second polysilane component; and
applying the second liquid material to the substrate.
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Specification