Z offset MEMS device
First Claim
Patent Images
1. A microelectromechanical (MEMS) device comprising:
- a mechanism layer comprising;
a first part; and
a second part; and
at least one cover for sealing at least a portion of the mechanism layer, the at least one cover comprising;
an inner surface;
an outer surface; and
a structure protruding from the inner surface of the at least one cover, wherein the structure mechanically causes the first part to be deflected out of a plane associated with the second part when the at least one cover is attached to the mechanism layer.
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Abstract
A microelectromechanical system (MEMS) device with a mechanism layer having a first part and a second part, and at least one cover for sealing the mechanism layer. The inner surface of at least one of the covers is structured such that a protruding structure is present on the inner surface of the cover and wherein the protruding structure mechanically causes the first part to be deflected out of a plane associated with the second part.
21 Citations
17 Claims
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1. A microelectromechanical (MEMS) device comprising:
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a mechanism layer comprising;
a first part; and
a second part; and
at least one cover for sealing at least a portion of the mechanism layer, the at least one cover comprising;
an inner surface;
an outer surface; and
a structure protruding from the inner surface of the at least one cover, wherein the structure mechanically causes the first part to be deflected out of a plane associated with the second part when the at least one cover is attached to the mechanism layer. - View Dependent Claims (2, 3, 4, 5)
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6. A microelectromechanical (MEMS) device comprising:
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a mechanism layer comprising;
a first part;
a second part; and
a third part; and
a top cover having a first surface;
a bottom cover having a first surface;
a first structure protruding from the first surface of the top cover, the first structure causes the first part to mechanically deflect out of a plane associated with the second part when the top cover is attached to the mechanism layer; and
a second structure protruding from the first surface of the bottom cover, the second structure causes the third part to mechanically deflect out of the plane associated with the second part when the bottom cover is attached to the mechanism layer. - View Dependent Claims (7, 8, 9, 10, 11, 12)
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13. A method of sensing an external influence with a microelectromechanical (MEMS) device, the MEMS device includes a mechanism layer having first and second parts and one or more covers for encasing the first and second parts, the method comprising:
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deflecting the first part out of a plane associated with the second part by mechanical contact with a structure attached to the one or more covers when the one or more covers are attached to the mechanism layer; and
measuring a change in a value associated with a movement orthogonal to the plane associated with the second part of the second part in relation to the first part. - View Dependent Claims (14, 15, 16)
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17. A method of sensing an external influence with a microelectromechanical (MEMS) device, the MEMS device includes a mechanism layer having a first part, a second part, and a third part, a top cover, and a bottom cover for encasing the first fixed part, the second fixed part, and the movable part, the method comprising:
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deflecting the first part out of a plane associated with the third part by mechanical contact with a structure attached to the top cover when the top cover is attached to the mechanism layer;
deflecting the second part out of the plane associated with the third part by mechanical contact with a structure attached to the bottom cover when the bottom cover is attached to the mechanism layer; and
measuring a change in a value associated with a movement orthogonal to the plane associated with the third part of the third part in relation to the first part and the second parts.
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Specification