×

Apparatus for generating remote plasma

  • US 20070193515A1
  • Filed: 02/07/2007
  • Published: 08/23/2007
  • Est. Priority Date: 02/17/2006
  • Status: Abandoned Application
First Claim
Patent Images

1. An apparatus for generating a remote plasma, comprising:

  • an RF (radio frequency) antenna disposed in regard to a chamber;

    a plasma generating unit formed in an uppermost portion of the chamber, wherein a plurality of plasma generation gas introduction pipes are communicated with the plasma generating unit;

    a first shower head disposed below the plasma generating unit, and including a plurality of first plasma guide holes;

    a second shower head disposed below the first shower head, and including a plurality of source/purge gas guide holes and a plurality of second plasma guide holes directly connected to the respective first plasma guide holes; and

    a source/purge gas introduction unit disposed between the first and second shower heads, wherein a plurality of source/purge gas introduction pipes are uniformly communicated with the source/purge gas introduction unit.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×