Semiconductor inspection system
First Claim
1. A semiconductor inspection system, comprising:
- a navigation system for storing design information such as CAD data of a semiconductor chip and for setting capturing and inspecting conditions including a region on a semiconductor wafer subject to inspection based on the design information; and
a scanning electron microscope system for performing actual capturing of the semiconductor wafer and for executing inspection in accordance with the capturing and inspecting conditions being set up.
0 Assignments
0 Petitions
Accused Products
Abstract
An operator-free and fully automated semiconductor inspection system with high throughput is realized. All conditions required for capturing and inspection are generated from design information such as CAD data. In order to perform actual inspection under the conditions, a semiconductor inspection system is composed of a navigation system for generating all the conditions required for capturing and inspection from the design information and a scanning electron microscope system for actually performing capturing and inspection. Moreover, in the case of performing a matching process between designed data and a SEM image, deformed parts are corrected by use of edge information in accordance with multiple directions and smoothing thereof. Furthermore, a SEM image corresponding to a detected position is re-registered as a template, and the matching process is thereby performed.
21 Citations
2 Claims
-
1. A semiconductor inspection system, comprising:
-
a navigation system for storing design information such as CAD data of a semiconductor chip and for setting capturing and inspecting conditions including a region on a semiconductor wafer subject to inspection based on the design information; and
a scanning electron microscope system for performing actual capturing of the semiconductor wafer and for executing inspection in accordance with the capturing and inspecting conditions being set up.
-
-
2-23. -23. (canceled)
Specification
-
- Resources
-
Current AssigneeAtsushi Takane, Haruo Yoda, Mitsuji Ikeda, Shoji Yoshida, Yasuhiko Ozawa
-
Original AssigneeAtsushi Takane, Haruo Yoda, Mitsuji Ikeda, Shoji Yoshida, Yasuhiko Ozawa
-
InventorsYoshida, Shoji, Yoda, Haruo, Ikeda, Mitsuji, Takane, Atsushi, Ozawa, Yasuhiko
-
Application NumberUS11/790,224Publication NumberTime in Patent OfficeDaysField of SearchUS Class Current250/310CPC Class CodesH01J 37/28 with scanning beams H01J37/...
