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DIRECT LIQUID INJECTOR DEVICE

  • US 20070194470A1
  • Filed: 02/19/2007
  • Published: 08/23/2007
  • Est. Priority Date: 02/17/2006
  • Status: Abandoned Application
First Claim
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1. A direct liquid injector device comprising:

  • a carrier gas inlet;

    a liquid metering valve delivering a liquid precursor into a volume of a carrier gas/liquid interface unit;

    a vaporizer body receiving a mixture of the liquid precursor and a carrier gas;

    a heating element in thermal contact with said vaporizer body;

    a matrix material within said vaporizer body;

    at least one high conductance run/vent valve located downstream from said vaporizing body for meter the mixture along a conduit for delivery into a remote process chamber.

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