Three-dimensional pvd targets, and methods of forming three-dimensional pvd targets
First Claim
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1. A method of forming a three-dimensional physical vapor deposition target, comprising:
- forming a can substantially complementary to a desired three-dimensional shape of the target;
placing powdered material within the can;
subjecting the canned powder to hot isostatic pressing to form the material substantially into a physical vapor deposition target substantially having the desired three-dimensional shape; and
removing only a portion of the can from the physical vapor deposition target.
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Abstract
The invention includes methods by which hot isostatic pressing is utilized to form physical vapor deposition targets. In particular aspects, the physical vapor deposition targets can contain one or more of iridium, cobalt, ruthenium, tungsten, molybdenum, titanium, aluminum and tantalum; and/or one or more of aluminides, silicides, carbides and chalcogenides. The invention also includes three-dimensional targets which include one or more of iridium, cobalt, ruthenium, tungsten molybdenum, titanium, aluminum and tantalum.
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Citations
43 Claims
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1. A method of forming a three-dimensional physical vapor deposition target, comprising:
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forming a can substantially complementary to a desired three-dimensional shape of the target;
placing powdered material within the can;
subjecting the canned powder to hot isostatic pressing to form the material substantially into a physical vapor deposition target substantially having the desired three-dimensional shape; and
removing only a portion of the can from the physical vapor deposition target. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A method of forming a hollow cathode magnetron target, comprising:
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forming a can substantially complementary to a desired hollow cathode magnetron target shape;
placing powdered material within the can, the powdered material comprising one or more of iridium, cobalt, ruthenium, tungsten, molybdenum, titanium, aluminum and tantalum;
subjecting the canned powder to hot isostatic pressing to form the material substantially into a physical vapor deposition target substantially having the desired hollow cathode magnetron target shape; and
removing a first portion of the can from the physical vapor deposition target while leaving a second portion of the can as a backing plate attached to the physical vapor deposition target. - View Dependent Claims (17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31)
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32. (canceled)
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33. (canceled)
- 34. A three-dimensional physical vapor deposition target comprising a composition containing one or more of iridium, ruthenium, and chalcogenide.
Specification