THREE DIMENSIONAL MULTILAYER BARRIER AND METHOD OF MAKING
First Claim
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1. A three dimensional multilayer barrier comprising:
- a first continuous barrier layer adjacent to a substrate;
a discontinuous decoupling layer adjacent to the first continuous barrier layer, the discontinuous decoupling layer having at least two sections; and
a second continuous barrier layer adjacent to the discontinuous decoupling layer, the second continuous barrier layer forming a wall separating the sections of the discontinuous decoupling layer.
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Abstract
A three dimensional multilayer barrier. The barrier includes a first barrier continuous layer adjacent to a substrate; a first discontinuous decoupling layer adjacent to the first continuous barrier layer, the first discontinuous decoupling layer having at least two sections; and a second continuous barrier layer adjacent to the first discontinuous decoupling layer, the second barrier forming a wall separating the sections of the first discontinuous decoupling layer. A method of making the three dimensional multilayer barrier is also described.
178 Citations
31 Claims
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1. A three dimensional multilayer barrier comprising:
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a first continuous barrier layer adjacent to a substrate;
a discontinuous decoupling layer adjacent to the first continuous barrier layer, the discontinuous decoupling layer having at least two sections; and
a second continuous barrier layer adjacent to the discontinuous decoupling layer, the second continuous barrier layer forming a wall separating the sections of the discontinuous decoupling layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. A method of making a three dimensional multilayer barrier comprising:
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depositing a first continuous barrier layer adjacent to a substrate;
depositing a first discontinuous decoupling layer adjacent to the first continuous barrier layer, the first discontinuous decoupling layer having at least two sections;
depositing a second continuous barrier layer adjacent to the first discontinuous decoupling layer, the second continuous barrier layer forming a wall separating the sections of the first discontinuous decoupling layer. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28, 29, 30, 31)
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Specification