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Capacitance dielectric layer, capacitor and forming method thereof

  • US 20070196977A1
  • Filed: 02/21/2006
  • Published: 08/23/2007
  • Est. Priority Date: 02/21/2006
  • Status: Active Grant
First Claim
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1. A capacitance dielectric layer, comprising:

  • a first dielectric layer;

    a second dielectric layer; and

    a silicon nitride stacked layer disposed between the first dielectric layer and the second dielectric layer.

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