Selection of wavelengths for integrated circuit optical metrology
First Claim
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1. A method of selecting wavelengths for use in optical metrology of an integrated circuit structure having a nominal profile, the method comprising:
- determining one or more termination criteria;
determining one or more selection criteria;
creating a correlation matrix for a set of diffraction spectra measured at optical metrology measurement points, the measurement points corresponding to specified wavelengths, the correlation matrix having as matrix members correlation coefficients corresponding to the measurement points;
selecting wavelengths using the set of diffraction spectra for the integrated circuit structure, the selection criteria, and a wavelength selection algorithm; and
performing the selecting step until the termination criteria are met.
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Abstract
Specific wavelengths to use in optical metrology of an integrated circuit can be selected using one or more selection criteria and termination criteria. Wavelengths are selected using the selection criteria, and the selection of wavelengths is iterated until the termination criteria are met.
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Citations
7 Claims
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1. A method of selecting wavelengths for use in optical metrology of an integrated circuit structure having a nominal profile, the method comprising:
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determining one or more termination criteria;
determining one or more selection criteria;
creating a correlation matrix for a set of diffraction spectra measured at optical metrology measurement points, the measurement points corresponding to specified wavelengths, the correlation matrix having as matrix members correlation coefficients corresponding to the measurement points;
selecting wavelengths using the set of diffraction spectra for the integrated circuit structure, the selection criteria, and a wavelength selection algorithm; and
performing the selecting step until the termination criteria are met. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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Specification