Method and apparatus for using a database to quickly identify and correct a manufacturing problem area in a layout

• US 20070198958A1
• Filed: 12/12/2006
• Published: 08/23/2007
• Est. Priority Date: 02/17/2006
• Status: Active Grant

• Current Assignee: Synopsys Incorporated
• Original Assignee: Synopsys Incorporated
• Inventors: Fang, Weiping, Song, Hua, Zhang, Daniel N., Kim, Juhwan, Tang, Zong Wu, Melvin, Lawrence S.
• Granted Patent: US 7,584,450 B2
• Time in Patent Office: Days
• US Class Current: 716/52
• CPC Class Codes: G03F 1/36 Masks having proximity correction features; Preparation thereof, e.g. optical proximity correction [OPC] design processes
• CPC Class Codes: G05B 2219/45031 Manufacturing semiconductor wafers
• CPC Class Codes: G06F 2119/18 Manufacturability analysis or optimisation for manufacturability
• CPC Class Codes: G06F 30/398 Design verification or optimisation, e.g. using design rule check [DRC], layout versus schematics [LVS] or finite element methods [FEM] optical proximity correction [OPC] design processes G03F1/36
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

One embodiment provides a system for using a database to quickly identify a manufacturing problem area in a layout. During operation, the system receives a first check-figure which identifies a first area in a first layout, wherein the first area is associated with a first feature. Next, the system determines a first sample using the first check-figure, wherein the first sample represents the first layout'"'"'s geometry within a first ambit of the first check-figure, wherein the first sample'"'"'s geometry is expected to affect the shape of the first feature. The system then performs a model-based simulation using the first sample to obtain a first simulation-result which indicates whether the first feature is expected to have manufacturing problems. Next, the system stores the first simulation-result in a database which is used to quickly determine whether a second feature is expected to have manufacturing problems.

Claims

1. A method for using a database to quickly identify a manufacturing problem area in a layout, the method comprising:

receiving a first check-figure which identifies a first area in a first layout, wherein the first area is associated with a first feature;

determining a first sample using the first check-figure, wherein the first sample represents the first layout'"'"'s geometry within a first ambit of the first check-figure, wherein the first sample'"'"'s geometry is expected to affect the shape of the first feature;

performing a model-based simulation using the first sample to obtain a first simulation-result which indicates whether the first feature is expected to have manufacturing problems; and

storing the first simulation-result in a database which is used to quickly determine whether a second feature is expected to have manufacturing problems.

2. The method of claim 1, further comprising:

receiving a second check-figure which identifies a second area in a second layout, wherein the second area is associated with the second feature;

determining a second sample using the second check-figure, wherein the second sample represents the second layout'"'"'s geometry within a second ambit of the second check-figure, wherein the second sample'"'"'s geometry is expected to affect the shape of the second feature;

using the database to quickly determine whether the second feature is expected to have manufacturing problems; and

generating an indicator to indicate whether the second feature is expected to have manufacturing problems.

3. The method of claim 2, wherein using the database to quickly determine whether the second feature is expected to have manufacturing problems involves:

querying the database using the second sample to determine a third simulation-result which is associated with a third sample, wherein the third sample'"'"'s geometry is substantially similar to the second sample'"'"'s geometry; and

using the third simulation-result to determine whether the second feature is expected to have manufacturing problems.

4. The method of claim 1, wherein performing the model-based simulation involves convolving a process model with the first sample.

5. The method of claim 1, wherein prior to receiving the first check-figure, the method comprises:

identifying a polygon'"'"'s edge which is susceptible to manufacturing problems; and

generating the first check-figure which is associated with the polygon'"'"'s edge.

6. The method of claim 1, wherein storing the first simulation-result involves:

generating a first identifier using the first sample'"'"'s geometry; and

storing the first identifier and the first simulation-result in the database such that the first simulation-result can be queried using the first identifier.

7. The method of claim 6, further comprising:

if the first feature is expected to have manufacturing problems, determining a first proximity-correction using the first sample; and

storing the first proximity-correction in the database such that the first proximity-correction can be queried using the first identifier.

8. The method of claim 7, further comprising using the database to apply a second proximity-correction to the second sample by:

generating a second identifier using the second sample'"'"'s geometry;

querying the database using the second identifier to determine a third proximity-correction which is associated with a third sample, wherein the third sample'"'"'s geometry is substantially similar to the second sample'"'"'s geometry;

determining the second proximity-correction using the third proximity-correction; and

applying the second proximity-correction to the second sample.

9. A method for using a database to quickly identify a manufacturing problem area in a layout, wherein the database associates a first sample with a first simulation-result, wherein the first sample represents a portion of a first layout which is expected to affect a first feature'"'"'s shape, and wherein the first simulation-result is obtained by performing a model-based simulation using the first sample, the method comprising:

receiving a second check-figure in a second layout, wherein the second check-figure is associated with a second feature;

determining a second sample using the second check-figure, wherein the second sample represents the second layout'"'"'s geometry within a second ambit of the second check-figure, wherein the second sample'"'"'s geometry is expected to affect the shape of the second feature;

using the database to quickly determine whether the second feature is expected to have manufacturing problems by;

querying the database using the second sample to determine a third simulation-result which is associated with a third sample, wherein the third sample'"'"'s geometry is substantially similar to the second sample'"'"'s geometry; and

using the third simulation-result to determine whether the second feature is expected to have manufacturing problems; and

generating an indicator to indicate whether the second feature is expected to have manufacturing problems.

10. The method of claim 9, wherein the database associates the first sample with a first proximity-correction, and wherein the method further comprises using the database to apply a second proximity-correction to the second sample by:

querying the database using the second sample to determine a third proximity-correction which is associated with a third sample, wherein the third sample'"'"'s geometry is substantially similar to the second sample'"'"'s geometry;

determining the second proximity-correction using the third proximity-correction; and

applying the second proximity-correction to the second sample.

11. A computer-readable storage medium storing instructions that when executed by a computer cause the computer to perform a method for using a database to quickly identify a manufacturing problem area in a layout, the method comprising:

receiving a first check-figure which identifies a first area in a first layout, wherein the first area is associated with a first feature;

determining a first sample using the first check-figure, wherein the first sample represents the first layout'"'"'s geometry within a first ambit of the first check-figure, wherein the first sample'"'"'s geometry is expected to affect the shape of the first feature;

performing a model-based simulation using the first sample to obtain a first simulation-result which indicates whether the first feature is expected to have manufacturing problems; and

storing the first simulation-result in a database which is used to quickly determine whether a second feature is expected to have manufacturing problems.

12. The computer-readable storage medium of claim 11, further comprising:

receiving a second check-figure which identifies a second area in a second layout, wherein the second area is associated with the second feature;

determining a second sample using the second check-figure, wherein the second sample represents the second layout'"'"'s geometry within a second ambit of the second check-figure, wherein the second sample'"'"'s geometry is expected to affect the shape of the second feature;

using the database to quickly determine whether the second feature is expected to have manufacturing problems; and

generating an indicator to indicate whether the second feature is expected to have manufacturing problems.

13. The computer-readable storage medium of claim 12, wherein using the database to quickly determine whether the second feature is expected to have manufacturing problems involves:

querying the database using the second sample to determine a third simulation-result which is associated with a third sample, wherein the third sample'"'"'s geometry is substantially similar to the second sample'"'"'s geometry; and

using the third simulation-result to determine whether the second feature is expected to have manufacturing problems.

14. The computer-readable storage medium of claim 11, wherein performing the model-based simulation involves convolving a process model with the first sample.

15. The computer-readable storage medium of claim 11, wherein prior to receiving the first check-figure, the method comprises:

identifying a polygon'"'"'s edge which is susceptible to manufacturing problems; and

generating the first check-figure which is associated with the polygon'"'"'s edge.

16. The computer-readable storage medium of claim 11, wherein storing the first simulation-result involves:

generating a first identifier using the first sample'"'"'s geometry; and

storing the first identifier and the first simulation-result in the database such that the first simulation-result can be queried using the first identifier.

17. The computer-readable storage medium of claim 16, further comprising:

if the first feature is expected to have manufacturing problems, determining a first proximity-correction using the first sample; and

storing the first proximity-correction in the database such that the first proximity-correction can be queried using the first identifier.

18. The computer-readable storage medium of claim 17, further comprising using the database to apply a second proximity-correction to the second sample by:

generating a second identifier using the second sample'"'"'s geometry;

querying the database using the second identifier to determine a third proximity-correction which is associated with a third sample, wherein the third sample'"'"'s geometry is substantially similar to the second sample'"'"'s geometry;

determining the second proximity-correction using the third proximity-correction; and

applying the second proximity-correction to the second sample.

19. A computer-readable storage medium storing instructions that when executed by a computer cause the computer to perform a method for using a database to quickly identify a manufacturing problem area in a layout, wherein the database associates a first sample with a first simulation-result, wherein the first sample represents a portion of a first layout which is expected to affect a first feature'"'"'s shape, and wherein the first simulation-result is obtained by performing a model-based simulation using the first sample, the method comprising:

receiving a second check-figure in a second layout, wherein the second check-figure is associated with a second feature;

determining a second sample using the second check-figure, wherein the second sample represents the second layout'"'"'s geometry within a second ambit of the second check-figure, wherein the second sample'"'"'s geometry is expected to affect the shape of the second feature;

using the database to quickly determine whether the second feature is expected to have manufacturing problems by;

querying the database using the second sample to determine a third simulation-result which is associated with a third sample, wherein the third sample'"'"'s geometry is substantially similar to the second sample'"'"'s geometry; and

using the third simulation-result to determine whether the second feature is expected to have manufacturing problems; and

generating an indicator to indicate whether the second feature is expected to have manufacturing problems.

20. The computer-readable storage medium of claim 19, wherein the database associates the first sample with a first proximity-correction, and wherein the method further comprises using the database to apply a second proximity-correction to the second sample by:

querying the database using the second sample to determine a third proximity-correction which is associated with a third sample, wherein the third sample'"'"'s geometry is substantially similar to the second sample'"'"'s geometry;

determining the second proximity-correction using the third proximity-correction; and

applying the second proximity-correction to the second sample.