Method and apparatus for using a database to quickly identify and correct a manufacturing problem area in a layout
First Claim
1. A method for using a database to quickly identify a manufacturing problem area in a layout, the method comprising:
- receiving a first check-figure which identifies a first area in a first layout, wherein the first area is associated with a first feature;
determining a first sample using the first check-figure, wherein the first sample represents the first layout'"'"'s geometry within a first ambit of the first check-figure, wherein the first sample'"'"'s geometry is expected to affect the shape of the first feature;
performing a model-based simulation using the first sample to obtain a first simulation-result which indicates whether the first feature is expected to have manufacturing problems; and
storing the first simulation-result in a database which is used to quickly determine whether a second feature is expected to have manufacturing problems.
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Accused Products
Abstract
One embodiment provides a system for using a database to quickly identify a manufacturing problem area in a layout. During operation, the system receives a first check-figure which identifies a first area in a first layout, wherein the first area is associated with a first feature. Next, the system determines a first sample using the first check-figure, wherein the first sample represents the first layout'"'"'s geometry within a first ambit of the first check-figure, wherein the first sample'"'"'s geometry is expected to affect the shape of the first feature. The system then performs a model-based simulation using the first sample to obtain a first simulation-result which indicates whether the first feature is expected to have manufacturing problems. Next, the system stores the first simulation-result in a database which is used to quickly determine whether a second feature is expected to have manufacturing problems.
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Citations
20 Claims
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1. A method for using a database to quickly identify a manufacturing problem area in a layout, the method comprising:
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receiving a first check-figure which identifies a first area in a first layout, wherein the first area is associated with a first feature; determining a first sample using the first check-figure, wherein the first sample represents the first layout'"'"'s geometry within a first ambit of the first check-figure, wherein the first sample'"'"'s geometry is expected to affect the shape of the first feature; performing a model-based simulation using the first sample to obtain a first simulation-result which indicates whether the first feature is expected to have manufacturing problems; and storing the first simulation-result in a database which is used to quickly determine whether a second feature is expected to have manufacturing problems. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method for using a database to quickly identify a manufacturing problem area in a layout, wherein the database associates a first sample with a first simulation-result, wherein the first sample represents a portion of a first layout which is expected to affect a first feature'"'"'s shape, and wherein the first simulation-result is obtained by performing a model-based simulation using the first sample, the method comprising:
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receiving a second check-figure in a second layout, wherein the second check-figure is associated with a second feature; determining a second sample using the second check-figure, wherein the second sample represents the second layout'"'"'s geometry within a second ambit of the second check-figure, wherein the second sample'"'"'s geometry is expected to affect the shape of the second feature; using the database to quickly determine whether the second feature is expected to have manufacturing problems by; querying the database using the second sample to determine a third simulation-result which is associated with a third sample, wherein the third sample'"'"'s geometry is substantially similar to the second sample'"'"'s geometry; and using the third simulation-result to determine whether the second feature is expected to have manufacturing problems; and generating an indicator to indicate whether the second feature is expected to have manufacturing problems. - View Dependent Claims (10)
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11. A computer-readable storage medium storing instructions that when executed by a computer cause the computer to perform a method for using a database to quickly identify a manufacturing problem area in a layout, the method comprising:
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receiving a first check-figure which identifies a first area in a first layout, wherein the first area is associated with a first feature; determining a first sample using the first check-figure, wherein the first sample represents the first layout'"'"'s geometry within a first ambit of the first check-figure, wherein the first sample'"'"'s geometry is expected to affect the shape of the first feature; performing a model-based simulation using the first sample to obtain a first simulation-result which indicates whether the first feature is expected to have manufacturing problems; and storing the first simulation-result in a database which is used to quickly determine whether a second feature is expected to have manufacturing problems. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18)
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19. A computer-readable storage medium storing instructions that when executed by a computer cause the computer to perform a method for using a database to quickly identify a manufacturing problem area in a layout, wherein the database associates a first sample with a first simulation-result, wherein the first sample represents a portion of a first layout which is expected to affect a first feature'"'"'s shape, and wherein the first simulation-result is obtained by performing a model-based simulation using the first sample, the method comprising:
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receiving a second check-figure in a second layout, wherein the second check-figure is associated with a second feature; determining a second sample using the second check-figure, wherein the second sample represents the second layout'"'"'s geometry within a second ambit of the second check-figure, wherein the second sample'"'"'s geometry is expected to affect the shape of the second feature; using the database to quickly determine whether the second feature is expected to have manufacturing problems by; querying the database using the second sample to determine a third simulation-result which is associated with a third sample, wherein the third sample'"'"'s geometry is substantially similar to the second sample'"'"'s geometry; and using the third simulation-result to determine whether the second feature is expected to have manufacturing problems; and generating an indicator to indicate whether the second feature is expected to have manufacturing problems. - View Dependent Claims (20)
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Specification