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Method and apparatus for using a database to quickly identify and correct a manufacturing problem area in a layout

  • US 20070198958A1
  • Filed: 12/12/2006
  • Published: 08/23/2007
  • Est. Priority Date: 02/17/2006
  • Status: Active Grant
First Claim
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1. A method for using a database to quickly identify a manufacturing problem area in a layout, the method comprising:

  • receiving a first check-figure which identifies a first area in a first layout, wherein the first area is associated with a first feature;

    determining a first sample using the first check-figure, wherein the first sample represents the first layout'"'"'s geometry within a first ambit of the first check-figure, wherein the first sample'"'"'s geometry is expected to affect the shape of the first feature;

    performing a model-based simulation using the first sample to obtain a first simulation-result which indicates whether the first feature is expected to have manufacturing problems; and

    storing the first simulation-result in a database which is used to quickly determine whether a second feature is expected to have manufacturing problems.

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