MEMS FILTER MODULE
First Claim
1. A filter module, comprising:
- a first film comprising a surface, a perimeter and a plurality of first flow ports;
a first annular seal extending around the perimeter of said first film and projecting above the surface of said first film; and
a filtering region bounded by said first annular seal, wherein all of said first flow ports are located in said filtering region.
1 Assignment
0 Petitions
Accused Products
Abstract
Various MEMS filter elements or modules are disclosed. One such MEMS filter module (34) includes a first film (70) and a second film (46) that are spaced and interconnected by a plurality of supports (78). A plurality of first flow ports (74) extend through the first film (70), and a plurality of second flow ports (50) extend through the second film (46). A plurality of annular filter walls (54) extend from the second film (46) toward the first film (70), and are separated therefrom by a filter trap gap (58). A filter trap chamber (62) is disposed on each side of each filter trap gap (58). Therefore, fluid will flow into one filter trap chamber (62), through a filter trap gap (58), and into another filter trap chamber (62), whether the flow is introduced into the filter module (34) through the first flow ports (74) or the second flow ports (50).
101 Citations
34 Claims
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1. A filter module, comprising:
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a first film comprising a surface, a perimeter and a plurality of first flow ports;
a first annular seal extending around the perimeter of said first film and projecting above the surface of said first film; and
a filtering region bounded by said first annular seal, wherein all of said first flow ports are located in said filtering region. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A filter module, comprising:
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a first film comprising a first perimeter and a plurality of first flow ports;
a second film comprising a second perimeter and a plurality of second flow ports, wherein said second film is spaced from said first film;
a first annular seal extending around the first and second perimeters of said first and second films, respectively; and
a filtering region bounded by said first annular seal, wherein all of said first flow ports and said second flow ports are located in said filtering region. - View Dependent Claims (10, 11, 12, 13, 14)
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15. A filter module, comprising:
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a film comprising a perimeter and a plurality of flow ports;
a first annular seal extending around the perimeter of said film;
a filtering region bounded by said first annular seal, wherein all of said first flow ports are located in said filtering region; and
a support within the region bounded by said first annular seal for supporting said film in said filtering region. - View Dependent Claims (16, 17, 18, 19)
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20. A filter module, comprising:
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a film comprising first and second opposed surfaces, a perimeter and at least one flow passage;
a first annular seal extending around the perimeter of said film;
a filtering region bounded by said first annular seal, wherein said at least one flow passage is located in said filtering region;
at least one first support within the region bounded by said first annular seal and in contact with the first surface of said film for supporting said film in said filtering region; and
at least one second support within the region bounded by said first annular seal and in contact with the second surface of said film for supporting said film in said filtering region. - View Dependent Claims (21, 22, 23, 24)
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25. A filter module, comprising:
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a film comprising a perimeter and at least one noncircular flow passage;
a first annular seal extending around the perimeter of said film; and
a filtering region bounded by said first annular seal, wherein said at least one noncircular flow passage is located in said filtering region. - View Dependent Claims (26, 27, 28, 29, 30, 31, 32, 33, 34)
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Specification