Gate-all-around type of semiconductor device and method of fabricating the same
First Claim
1. A gate-all-around (GAA) transistor, comprising:
- a first pillar comprising a source region;
a second pillar comprising a drain region and spaced from the first pillar;
a channel region bridging the source region of said first pillar and the drain region of said second pillar;
a gate insulating layer and a gate electrode which surround the channel region; and
insulative material disposed between the pillars laterally of said gate electrode below said channel region.
0 Assignments
0 Petitions
Accused Products
Abstract
A gate-all-around (GAA) transistor device has a pair of pillars that include the source/drain regions, a channel region bridging the source/drain regions, and a gate electrode and gate oxide which surround the channel region. The pillars are formed by providing a mono-crystalline silicon substrate, etching the substrate to form a pair of spaced-apart trenches such that a wall of the mono-crystalline silicon stands between the trenches, filling the trenches with insulative material, implanting impurities into the wall of mono-crystalline silicon, and forming an opening in the wall such that portions of the wall remain as pillars. A sacrificial layer is formed at the bottom of the opening. Then, the channel region is formed atop the sacrificial layer between the pillars. The sacrificial layer is subsequently removed and the gate oxide and gate electrode are formed around the channel region. One or more sidewall spacers are used to establish the effective width of the channel region and/or minimize parasitic capacitance between the source/drain regions and gate electrode.
57 Citations
18 Claims
-
1. A gate-all-around (GAA) transistor, comprising:
-
a first pillar comprising a source region;
a second pillar comprising a drain region and spaced from the first pillar;
a channel region bridging the source region of said first pillar and the drain region of said second pillar;
a gate insulating layer and a gate electrode which surround the channel region; and
insulative material disposed between the pillars laterally of said gate electrode below said channel region. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
-
-
10. A gate-all-around (GAA) transistor, comprising:
-
a first pillar comprising a source region;
a second pillar comprising a drain region and spaced from the first pillar;
a channel region bridging the source region of said first pillar and the drain region of said second pillar; and
a gate insulating layer and a gate electrode which surround the channel region, the gate electrode having a lower portion disposed below the channel region, and the width of the channel region from the source region of said first pillar to the drain region of said second pillar being greater than the width of the lower portion of the gate electrode as measured in the same direction from the source region of said first pillar to the drain region of said second pillar. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18)
-
Specification