OPTICAL ELEMENT AND METHOD OF MANUFACTURING OPTICAL ELEMENT
First Claim
1. An optical element comprising:
- a substrate, anda first layer and a second layer formed on the substrate,wherein each of the first layer and the second layer comprises a repetition structure of spaces and structural parts at a pitch equal to or less than a wavelength of visible light in a vertical direction to a stack direction of the layers, andwherein, the repetition structure of the first layer and the repetition structure of the second layer overlap at an interface between the first layer and the second layer, in the stack direction of the layers.
1 Assignment
0 Petitions
Accused Products
Abstract
The present invention provides an optical element having a three-dimensional structure which can function in a visible range and can improve adherence at a structural interface of the element, and a method of manufacturing the optical element. The optical element including a substrate and at least a first layer and a second layer on the substrate is manufactured such that each of the first layer and the second layer has a repetition structure of spaces and structural parts at a pitch equal to or less than a wavelength of visible light, and at an interface between the first layer and the second layer, overlapped structures are provided in which the repetition structure of the first layer and the repetition structure of the second layer overlap in a stack direction of the layers.
-
Citations
9 Claims
-
1. An optical element comprising:
-
a substrate, and a first layer and a second layer formed on the substrate, wherein each of the first layer and the second layer comprises a repetition structure of spaces and structural parts at a pitch equal to or less than a wavelength of visible light in a vertical direction to a stack direction of the layers, and wherein, the repetition structure of the first layer and the repetition structure of the second layer overlap at an interface between the first layer and the second layer, in the stack direction of the layers. - View Dependent Claims (2, 3, 4, 5, 6, 7)
-
-
8. A method of manufacturing an optical element comprising a substrate, and a first layer and a second layer formed on the substrate, the method comprising the steps of:
-
forming the first layer on the substrate; processing in the first layer a repetition structure comprised of spaces and structural parts, having a pitch equal to or less than a wavelength of visible light; filling the spaces in the repetition structure with a material of a sacrificial layer; etching the sacrificial layer to expose an upper portion of the repetition structure from the sacrificial layer; forming the second layer on the repetition structure and the sacrificial layer; processing in the second layer a repetition structure comprised of spaces and structural parts, having a pitch equal to or less than a wavelength of visible light; and removing the sacrificial layer. - View Dependent Claims (9)
-
Specification